Patents by Inventor Chris Frederickson

Chris Frederickson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers
    Patent number: 6645046
    Abstract: A method and apparatus for conditioning a polishing pad are described. The method includes steps of providing a chemical mechanical polishing apparatus having a polishing region and a conditioning region; cycling a polishing member through the apparatus; contacting the polishing member in the conditioning region with a conditioning member; and conditioning the polishing member. The apparatus includes an end effector adapted to receive a conditioning member, the end effector being attached to an arm that can be moved horizontally and vertically, and a strain gauge that monitors the force applied to a polishing member.
    Type: Grant
    Filed: June 30, 2000
    Date of Patent: November 11, 2003
    Assignee: Lam Research Corporation
    Inventors: Michael Vogtmann, Chris Frederickson, Jeff Gasparitsch, Gene Hempel, Erik Engdahl