Patents by Inventor Chris Pencis

Chris Pencis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Robot for handling semiconductor wafers
    Patent number: 6582175
    Abstract: A multi-set robot is provided that includes a first robot set having a first motor coupled to a first rotatable member that is rotatable about an axis; a second motor coupled to a second rotatable member that is rotatable about the axis; a first plurality of blades vertically spaced from one another; and a first linkage adapted to enable coordinated movement of the blades on rotation of the first and second rotatable members. The robot also includes a second robot set positioned above the first robot set having a third motor coupled to a third rotatable member that is rotatable about the axis; a fourth motor coupled to a fourth rotatable member that is rotatable about the axis; a second plurality of blades vertically spaced from one another; and a second linkage adapted to enable coordinated movement of the blades on rotation of the third and fourth rotatable members. Other aspects are provided.
    Type: Grant
    Filed: April 29, 2002
    Date of Patent: June 24, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Damon Cox, Martin R. Elliott, Chris Pencis, Jeffrey C. Hudgens, Michael Robert Rice
  • Robot for handling semiconductor wafers
    Publication number: 20030035709
    Abstract: A multi-set robot is provided that includes a first robot set having a first motor coupled to a first rotatable member that is rotatable about an axis; a second motor coupled to a second rotatable member that is rotatable about the axis; a first plurality of blades vertically spaced from one another; and a first linkage adapted to enable coordinated movement of the blades on rotation of the first and second rotatable members. The robot also includes a second robot set positioned above the first robot set having a third motor coupled to a third rotatable member that is rotatable about the axis; a fourth motor coupled to a fourth rotatable member that is rotatable about the axis; a second plurality of blades vertically spaced from one another; and a second linkage adapted to enable coordinated movement of the blades on rotation of the third and fourth rotatable members. Other aspects are provided.
    Type: Application
    Filed: April 29, 2002
    Publication date: February 20, 2003
    Inventors: Damon Cox, Martin R. Elliott, Chris Pencis, Jeffrey C. Hudgens, Michael Robert Rice
  • Robot for handling semiconductor wafers
    Patent number: 6379095
    Abstract: An apparatus for processing semiconductor wafers has an automatic robot for independently and simultaneously handling two wafers (W) at the same time on two separate transfer planes.
    Type: Grant
    Filed: April 14, 2000
    Date of Patent: April 30, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Martin R. Elliott, Jeffrey C. Hudgens, Chris Pencis, Damon Cox