Patents by Inventor Chris S. Christos

Chris S. Christos has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Amorphous silicon carbide thin film coating
    Patent number: 6680489
    Abstract: Amorphous silicon carbide thin film structures, including: protective coatings for windows in infrared process stream monitoring systems and sensor domes, heated windows, electromagnetic interference shielding members and integrated micromachined sensors; high-temperature sensors and circuits; and diffusion barrier layers in VLSI circuits. The amorphous silicon carbide thin film structures are readily formed, e.g., by sputtering at low temperatures.
    Type: Grant
    Filed: April 25, 2000
    Date of Patent: January 20, 2004
    Assignee: Advanced Technology Materials, Inc.
    Inventors: George R. Brandes, Chris S. Christos, Xueping Xu
  • Amorphous silicon carbide thin film articles
    Publication number: 20020096684
    Abstract: Amorphous silicon carbide thin film structures, including: protective coatings for windows in infrared process stream monitoring systems and sensor domes, heated windows, electromagnetic interference shielding members and integrated micromachined sensors; high-temperature sensors and circuits; and diffusion barrier layers in VLSI circuits. The amorphous silicon carbide thin film structures are readily formed, e.g., by sputtering at low temperatures.
    Type: Application
    Filed: March 7, 2002
    Publication date: July 25, 2002
    Inventors: George R. Brandes, Chris S. Christos, Xueping Xu