Patents by Inventor Chris Van Peski

Chris Van Peski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Soft pellicle and method of making same
    Patent number: 7709180
    Abstract: The present invention relates generally to the fields of semiconductor lithography. More particularly, it concerns methods, compositions, and apparatuses relating to 157 nm, 167 nm, 193 nm, 248 nm, 365 nm, and 436 nm soft pellicles and the use of perfluorinated polymers in the creation of pellicles.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: May 4, 2010
    Assignee: Sematech, Inc.
    Inventors: Paul A. Zimmerman, Chris Van Peski
  • SOFT PELLICLE AND METHOD OF MAKING SAME
    Publication number: 20090081567
    Abstract: The present invention relates generally to the fields of semiconductor lithography. More particularly, it concerns methods, compositions, and apparatuses relating to 157 nm, 167 nm, 193 nm, 248 nm, 365 nm, and 436 nm soft pellicles and the use of perfluorinated polymers in the creation of pellicles.
    Type: Application
    Filed: September 30, 2008
    Publication date: March 26, 2009
    Inventors: Paul A. Zimmerman, Chris Van Peski