Abstract: An identification system for tracking wafer carriers within a manufacturing facility. The system uses smart card technology in which an identification card is placed on each wafer carrier. The smart cards have memory for storing information about the wafer carrier. Power is transmitted to the card along with data so that the smart card does not require a separate power source. The devices for communicating with the smart cards can be stationary or they can be portable hand-carried devices. A network connects the readers to a central database.

Abstract: An identification system for tracking wafer carriers within a manufacturing facility. The system uses smart card technology in which an identification card is placed on each wafer carrier. The smart cards have memory for storing information about the wafer carrier. Power is transmitted to the card along with data so that the smart card does not require a separate power source. The devices for communicating with the smart cards can be stationary or they can be portable hand-carried devices. A network connects the readers to a central database.

Abstract: An elastically expandable positioning device for positioning a cover of a unified pod is disclosed, which has a central fastener having one end protruded on the interface plate and an axial input hole opened at another end, and at least one radial distributing hole equally opened at its circular surface; a ring-shaped inflatable body made from an expandable elastic material; a supporting ring encircled around the central bolt and positioned above the distributing hole, for supporting the inflatable body, the supporting ring having at least one radial inflating hole equally positioned corresponding to the radial distributing hole of the central bolt; and an input fluid source connected to the axial input hole of the central bolt, for providing an input fluid.

Abstract: The present invention discloses a front-opening unified pod quick-opening apparatus positioned in a front-opening unified pod loading system, the apparatus has a rail, a slide, a short linking rod having a first end rotatably fixed on the slide to drive the slide to move along the rail, a long rocker arm having a first end rotatably fixed on a second end of the short linking rod, and a second end rotatably fixed on a pin on the backboard; and a power source. Wherein when the power source drives the long rocker arm to rotate upward round the pin on the backboard, the long rocker arm leads the short linking rod, and the short linking rod drives the slide to move upward along the rail then results in an upward rectilinear motion, and vice versa.

Abstract: A tunable, reconfigurable optical add/drop multiplexer comprises a first signal routing component and at least one wavelength selective switch having an input port and an output port. The input port is optically coupled to the first signal routing component. The wavelength signal selective switch is wavelength tunable, so as to allow a selected wavelength to be routed to the first signal routing component and the rest of the wavelengths to be routed to the output port. According to an embodiment of the present invention the first signal routing component is an optical circulator.

Abstract: A three DOF SCARA arm, adapted for transporting semiconductor wafers, includes an end-effector assembly at a distal joint of the arm. In one configuration, the end-effector turns a workpiece over. The arm includes a support column having an open column assembly that projects above a base. Within the assembly, a Z-axis drive energizes extension and retraction of a hollow tube carried by the support column. A shaft, rotatable about the Z-axis and having a distal end furthest from the support column's base, receives an arm assembly. An arm-assembly rotary-drive energizes the shaft's rotation. An arm base-plate, secured to the shaft's distal end, supports the arm assembly therefrom. The arm base-plate carries a wrist joint that is displaced from the Z-axis, and receives the end-effector whose rotation about a wrist-joint axis is energized by an end-effector rotary-drive.

Abstract: A three DOF SCARA arm, adapted for transporting semiconductor wafers, includes an end-effector assembly at a distal joint of the arm. In one configuration, the end-effector turns a workpiece over. The arm includes a support column having an open column assembly that projects above a base. Within the assembly, a Z-axis drive energizes extension and retraction of a hollow tube carried by the support column. A shaft, rotatable about the Z-axis and having a distal end furthest from the support column's base, receives an arm assembly. An arm-assembly rotary-drive energizes the shaft's rotation. An arm base-plate, secured to the shaft's distal end, supports the arm assembly therefrom. The arm base-plate carries a wrist joint that is displaced from the Z-axis, and receives the end-effector whose rotation about a wrist-joint axis is energized by an end-effector rotary-drive.

Abstract: An adapter for a sterilization cassette type apparatus in the form of a cassette is mounted in the cassette clamping members and is constructed as a fluid distributor with a plurality of funnel-shaped receiving openings each having a cylindrical outer wall for receiving of medical or dental instruments to be cleaned and/or sterilized.

Abstract: A fuzzy logic controller that is dynamically adaptive to varying operating conditions. The controller remaps the intervals of the membership functions between a normalized universe of discourse and the real axis by use of an input fuzzy gain and an output fuzzy gain. The membership functions are also remapped within the universe of discourse through the use of a sensitivity index. Remapping of the membership functions allows the sensitivity of the controller to be adapted to optimize the controller's performance in changing operating conditions. This allows a robust controller to be implemented at low computational expense.

Abstract: The present invention is related to a method used in a cursor controlling apparatus for detecting a direction a cursor should move on a monitor which comprises steps of: intermittently receiving a light to obtain a series of different optical quantities; generating a series of voltage signals respectively responsive to the series of optical quantities; and determining a direction by detecting a sequence of the voltage signals. The present invention can reduce manufacturing cost, economize assembling time, and obtain a more accurate direction.