Patents by Inventor Chris Wuester

Chris Wuester has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Counter flow mixer for process chamber
    Patent number: 10322384
    Abstract: A counterflow mixing device for a process chamber is disclosed, comprising an injection tube that introduces a fluid in a manner counter to a flow of a post-plasma gas mixture traveling downward from a plasma source. The invention allows for proper mixing of the fluid as well as avoiding recombination of generated ions and radicals.
    Type: Grant
    Filed: March 10, 2016
    Date of Patent: June 18, 2019
    Assignee: ASM IP Holding B.V.
    Inventors: John F. Stumpf, Chris Wuester
  • COUNTER FLOW MIXER FOR PROCESS CHAMBER
    Publication number: 20170130332
    Abstract: A counterflow mixing device for a process chamber is disclosed, comprising an injection tube that introduces a fluid in a manner counter to a flow of a post-plasma gas mixture traveling downward from a plasma source. The invention allows for proper mixing of the fluid as well as avoiding recombination of generated ions and radicals.
    Type: Application
    Filed: March 10, 2016
    Publication date: May 11, 2017
    Inventors: John F. Stumpf, Chris Wuester