Patents by Inventor Christ Ford

Christ Ford has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of 193 NM photoresist stabilization by the use of ion implantation
    Patent number: 6866986
    Abstract: A method of forming a photoresist includes forming a photoresist and patterning/developing it according to conventional methods. The photoresist is then subjected to ion implantation. The ions may be selected from the group consisting of argon, boron, boron fluoride, arsenic, phosphorous and nitrogen. The ion implantation during processing of the photoresist provides a stabilized photoresist and helps reduce CD loss, loss of the photoresist and formation of pin holes and striations.
    Type: Grant
    Filed: July 10, 2002
    Date of Patent: March 15, 2005
    Assignee: Cypress Semiconductor Corporation
    Inventors: Jun Sung Chun, Mehran Sedigh, Christ Ford
  • Method of 193 NM photoresist stabilization by the use of ion implantation
    Publication number: 20040009437
    Abstract: A method of forming a photoresist includes forming a photoresist and patterning/developing it according to conventional methods. The photoresist is then subjected to ion implantation. The ions may be selected from the group consisting of argon, boron, boron fluoride, arsenic, phosphorous and nitrogen. The ion implantation during processing of the photoresist provides a stabilized photoresist and helps reduce CD loss, loss of the photoresist and formation of pin holes and striations.
    Type: Application
    Filed: July 10, 2002
    Publication date: January 15, 2004
    Inventors: Jun Sung Chun, Mehran Sedigh, Christ Ford