Patents by Inventor Christan TEUNISSEN

Christan TEUNISSEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Replaceable module for a charged particle apparatus
    Patent number: 11961698
    Abstract: Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.
    Type: Grant
    Filed: June 10, 2021
    Date of Patent: April 16, 2024
    Assignee: ASML Netherlands B.V.
    Inventors: Christiaan Otten, Peter-Paul Crans, Marc Smits, Laura Del Tin, Christan Teunissen, Yang-Shan Huang, Stijn Wilem Herman Karel Steenbrink, Xuerang Hu, Qingpo Xi, Xinan Luo, Xuedong Liu
  • FLOOD COLUMN AND CHARGED PARTICLE APPARATUS
    Publication number: 20240006147
    Abstract: Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body arranged along the beam path; a lens arrangement arranged in a down-beam part of the flood column; and a lens support arranged between the anchor body and the lens arrangement; wherein the lens support is configured to position the lens arrangement and the anchor body relative to each other; the lens support comprises an electrical insulator; and the lens support is in the direct line of sight of at least a portion of the beam path in the down-beam part.
    Type: Application
    Filed: September 18, 2023
    Publication date: January 4, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Christiaan OTTEN, Christan TEUNISSEN, Paul Hendricus SCHEEPERS, Joseph Reinier MEIJER
  • REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
    Publication number: 20230107989
    Abstract: Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.
    Type: Application
    Filed: December 9, 2022
    Publication date: April 6, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Christiaan OTTEN, Peter-Paul CRANS, Marc SMITS, Laura DEL TIN, Christan TEUNISSEN, Yang-Shan HUANG, Stijn Wilem Herman Karel STEENBRINK, Xuerang HU, Qingpo XI, Xinan LUO, Xuedong LIU
  • REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
    Publication number: 20210391139
    Abstract: Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.
    Type: Application
    Filed: June 10, 2021
    Publication date: December 16, 2021
    Inventors: Christiaan OTTEN, Peter-Paul CRANS, Marc SMITS, Laura DEL TIN, Christan TEUNISSEN, Yang-Shan HUANG, Stijn Wilem, Herman, Karel STEENBRINK, Xuerang HU, Qingpo XI, Xinan LUO, Xuedong LIU