Abstract: A Fabry-Perot interferometer includes a first mirror plate with a first semi-transparent mirror, a second semi-transparent mirror to define an optical cavity together with the first mirror, and one or more first supporting elements to support the first mirror plate, wherein the first mirror plate has a first substantially planar surface and a second substantially planar surface defining the maximum thickness of the first mirror plate, wherein the first mirror plate is bonded to the one or more first supporting elements by three or more joints, wherein each joint is bonded to the first mirror plate at a bonding region, wherein the distance between each bonding region and the first substantially planar surface is greater than 30% of the thickness of the mirror plate, and the distance between each bonding region and the second substantially planar surface is greater than 30% of the thickness of the mirror plate.

Abstract: A mirror plate (100) for a Fabry-Perot interferometer (300) includes a substrate (50), which includes silicon (Si), a semi-transparent reflective coating (110) implemented on the substrate (50), a de-coupling structure (DC1) formed on the substrate (50), a first sensor electrode (G1a) formed on top of the de-coupling structure (DC1), and a second sensor electrode (G1b), wherein the de-coupling structure (DC1) includes an electrically insulating layer (60a), and a first stabilizing electrode (G0a), which is located between the first sensor electrode (G1a) and the substrate (50).

Abstract: An arrangement of a 3D measurement device according to the invention comprises an image source in order to produce consecutive images on a surface of an object, a camera to take pictures of the surface, and a processor unit in order to compare the pictures of the camera with said images. The arrangement comprises also a first area and a second area on the images. The arrangement further comprises at least one double detector in order to detect the illuminated first area and the illuminated second area, and a drive unit in order to trigger at least one camera. The drive unit is arranged to trigger the camera if the double detector indicates that a state of the first area changes and a state of the second area changes.

Abstract: A mirror plate (100) for a Fabry-Perot interferometer (300) includes a substrate (50), which includes silicon (Si), a semi-transparent reflective coating (110) implemented on the substrate (50), a de-coupling structure (DC1) formed on the substrate (50), a first sensor electrode (G1a) formed on top of the de-coupling structure (DC1), and a second sensor electrode (G1b), wherein the de-coupling structure (DC1) includes an electrically insulating layer (60a), and a first stabilizing electrode (G0a), which is located between the first sensor electrode (G1a) and the substrate (50).

Abstract: The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.

Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometeror a set of two or more Fabry-Perot Interferometers, and the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometersis controlled into different modes during the measurement of a single target. The invention can be applied inoptical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.

Abstract: The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.

Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers, and the pass band of the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers is controlled during the measurement of a single target. The invention can be applied in optical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.

Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers, and the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers is controlled into different modes during the measurement of a single target. The invention can be applied in optical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.

Abstract: An imaging spectrometer includes a Fabry-Perot interferometer and an image sensor having color-sensitive pixels. The interferometer has a first transmission peak and a second transmission peak (PEAK2). A method calibrating the spectrometer includes providing first calibration light, which has a narrow spectral peak, obtaining first detector signal values from the image sensor by coupling the first calibration light into the spectrometer when the reference spectral peak is near a first spectral position, obtaining second detector signal values from the image sensor by coupling the first calibration light into the spectrometer when the reference spectral peak is near a second spectral position, providing second calibration light, which has a broad bandwidth, and obtaining third detector signal values from the image sensor by coupling the second calibration light into the spectrometer.

Abstract: An imaging spectrometer includes a Fabry-Perot interferometer and an image sensor having color-sensitive pixels. The interferometer has a first transmission peak and a second transmission peak (PEAK2). A method calibrating the spectrometer includes providing first calibration light, which has a narrow spectral peak, obtaining first detector signal values from the image sensor by coupling the first calibration light into the spectrometer when the reference spectral peak is near a first spectral position, obtaining second detector signal values from the image sensor by coupling the first calibration light into the spectrometer when the reference spectral peak is near a second spectral position, providing second calibration light, which has a broad bandwidth, and obtaining third detector signal values from the image sensor by coupling the second calibration light into the spectrometer.

Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers, and the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers is controlled into different modes during the measurement of a single target. The invention can be applied in optical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.

Abstract: The invention relates to a method for attenuating magnetic interference in a test room (1, 2, 8, 9) equipped with a shield of ferromagnetic material, in which method the interfering magnetic field is measured and a compensating field is generated on the basis of the measurement result. According to the invention, the interfering field to be measured is resolved in three magnetic field components oriented in different directions, each one of said magnetic field components (x, y, z) is measured with the help of coils (3, 4, 5, 6) wound about the wall elements (1, 2, 8, 9) made from said ferromagnetic material in a manner wherein a flux component passing through at least one of the wall element (1, 2, 8, 9) made from said ferromagnetic material that is oriented parallel to one of said magnetic field components (x, y, z) is measured with the help of coils wound about said wall element.

Abstract: The invention relates to a method for attenuating magnetic interference in a test room (1, 2, 8, 9) equipped with a shield of ferromagnetic material, in which method the interfering magnetic field is measured and a compensating field is generated on the basis of the measurement result. According to the invention, the interfering field to be measured is resolved in three magnetic field components oriented in different directions, each one of said magnetic field components (x, y, z) is measured with the help of coils (3, 4, 5, 6) wound about the wall elements (1, 2, 8, 9) made from said ferromagnetic material in a manner wherein a flux component passing through at least one of the wall element (1, 2, 8, 9) made from said ferromagnetic material that is oriented parallel to one of said magnetic field components (x, y, z) is measured with the help of coils wound about said wall element.