Patents by Inventor Christi G. Willison

Christi G. Willison has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to control artifacts of microstructural fabrication
    Patent number: 7105098
    Abstract: New methods for fabrication of silicon microstructures have been developed. In these methods, an etching delay layer is deposited and patterned so as to provide differential control on the depth of features being etched into a substrate material. Compensation for etching-related structural artifacts can be accomplished by proper use of such an etching delay layer.
    Type: Grant
    Filed: June 6, 2002
    Date of Patent: September 12, 2006
    Assignee: Sandia Corporation
    Inventors: Randy J. Shul, Christi G. Willison, W. Kent Schubert, Ronald P. Manginell, Mary-Anne Mitchell, Paul C. Galambos