Abstract: An optical position-measuring device includes a scale and a scanning reticle, whose relative position is determinable in three linearly independent spatial directions using interfering light beams. A splitter grating is disposed on the scanning reticle and adapted to split light into sub-beams of different diffraction orders. An optical grating is disposed on the scale and adapted to further split the sub-beams and to recombine them after they have been reflected back from the scanning reticle. Grating fields configured as phase gratings are disposed on a side of the scanning reticle that faces the scale. The grating fields act as diffractive optics that influence the further split sub-beams. The grating fields have different step heights. An output grating is disposed on the scanning reticle and adapted to output, as interfering sub-beams, light that has been multiply reflected between the scale and the scanning reticle.

Abstract: An optical layer system for a position-measuring device includes at least first, second and third functional surfaces disposed on a surface of a transparent substrate. Each of the functional surfaces have a different optical function. The functional surfaces are composed of a first layer stack and a second layer stack.

Abstract: An optical position-measuring device includes a scale and a scanning reticle, whose relative position is determinable in three linearly independent spatial directions using interfering light beams. A splitter grating is disposed on the scanning reticle and adapted to split light into sub-beams of different diffraction orders. An optical grating is disposed on the scale and adapted to further split the sub-beams and to recombine them after they have been reflected back from the scanning reticle. Grating fields configured as phase gratings are disposed on a side of the scanning reticle that faces the scale. The grating fields act as diffractive optics that influence the further split sub-beams. The grating fields have different step heights. An output grating is disposed on the scanning reticle and adapted to output, as interfering sub-beams, light that has been multiply reflected between the scale and the scanning reticle.

Abstract: An optical layer system for a position-measuring device includes at least first, second and third functional surfaces disposed on a surface of a transparent substrate. Each of the functional surfaces have a different optical function. The functional surfaces are composed of a first layer stack and a second layer stack.