Patents by Inventor Christian Droese

Christian Droese has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Primary charged particle beam current measurement
    Patent number: 11817292
    Abstract: It is provided a current measurement module 100 for measuring a current of a primary charged particle beam 123 of a charged particle beam device, the current measurement module 100 including a detection unit 160 configured for detecting secondary and/or backscattered charged particles 127 released on impingement of the primary charged particle beam 123 on a conductive surface 142 of a beam dump 140 of the charged particle beam device.
    Type: Grant
    Filed: December 30, 2020
    Date of Patent: November 14, 2023
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: John Breuer, Christian Droese
  • PRIMARY CHARGED PARTICLE BEAM CURRENT MEASUREMENT
    Publication number: 20220208509
    Abstract: It is provided a current measurement module 100 for measuring a current of a primary charged particle beam 123 of a charged particle beam device, the current measurement module 100 including a detection unit 160 configured for detecting secondary and/or backscattered charged particles 127 released on impingement of the primary charged particle beam 123 on a conductive surface 142 of a beam dump 140 of the charged particle beam device.
    Type: Application
    Filed: December 30, 2020
    Publication date: June 30, 2022
    Inventors: John Breuer, Christian Droese