Patents by Inventor Christian Enkrich

Christian Enkrich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for the reproducible determination of the position of structures on a mask with a pellicle frame
    Patent number: 8352886
    Abstract: A method for the reproducible determination of the positions of structures (3) on a mask (2) is disclosed. A pellicle frame (30) is firmly attached to the mask (2). A theoretical model of the bending of the mask (2) with the firmly attached pellicle frame (30) is calculated, wherein material properties of the mask (2), of the pellicle frame (30), and of the attaching means between the pellicle frame (30) and the mask (2) are taken into account in the calculation of the bending of the mask (2). For the calculation of the bending of the mask (2) its contact with three support points is considered. The positions of the structures (3) on the mask (2) are measured with a metrology tool (1). The measured positions of each structure are corrected with the theoretical model of the bending of the mask at the position of the respectively measured structure.
    Type: Grant
    Filed: February 18, 2011
    Date of Patent: January 8, 2013
    Assignee: KLA-Tencor MIE GmbH
    Inventors: Frank Laske, Christian Enkrich, Eric Cotte
  • Method for the Reproducible Determination of the Position of Structures on a Mask with a Pellicle Frame
    Publication number: 20110225554
    Abstract: A method for the reproducible determination of the positions of structures (3) on a mask (2) is disclosed. A pellicle frame (30) is firmly attached to the mask (2). A theoretical model of the bending of the mask (2) with the firmly attached pellicle frame (30) is calculated, wherein material properties of the mask (2), of the pellicle frame (30), and of the attaching means between the pellicle frame (30) and the mask (2) are taken into account in the calculation of the bending of the mask (2). For the calculation of the bending of the mask (2) its contact with three support points is considered. The positions of the structures (3) on the mask (2) are measured with a metrology tool (1). The measured positions of each structure are corrected with the theoretical model of the bending of the mask at the position of the respectively measured structure.
    Type: Application
    Filed: February 18, 2011
    Publication date: September 15, 2011
    Applicant: KLA-TENCOR MIE GMBH
    Inventors: Frank Laske, Christian Enkrich, Eric Cotte