Patents by Inventor Christian Gruensfelder
Christian Gruensfelder has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9472554Abstract: Integrated circuits that have a FinFET and methods of fabricating the integrated circuits are provided herein. In an embodiment, a method of fabricating an integrated circuit having a FinFET includes providing a substrate comprising fins. The fins include semiconductor material. A first metal oxide layer is formed over sidewall surfaces of the fins. The first metal oxide layer includes a first metal oxide. The first metal oxide layer is recessed to a depth below a top surface of the fins to form a recessed first metal oxide layer. The top surface and sidewall surfaces of the fins at a top portion of the fins are free from the first metal oxide layer. A gate electrode structure is formed over the top surface and sidewall surfaces of the fins at the top portion of the fins. The recessed first metal oxide layer is recessed beneath the gate electrode structure.Type: GrantFiled: July 31, 2013Date of Patent: October 18, 2016Assignee: GLOBALFOUNDRIES, INC.Inventors: Michael Hargrove, Yanxiang Liu, Christian Gruensfelder
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Patent number: 9437740Abstract: Approaches for enabling epitaxial growth of silicon fins in a device (e.g., a fin field effect transistor device (FinFET)) are provided. Specifically, approaches are provided for forming a set of silicon fins for a FinFET device, the FinFET device comprising: a set of gate structures formed over a substrate, each of the set of gate structures including a capping layer and a set of spacers; an oxide fill formed over the set of gate structures; a set of openings formed in the device by removing the capping layer and the set of spacers from one or more of the set of gate structures; a silicon material epitaxially grown within the set of openings in the device and then planarized; and wherein the oxide fill is etched to expose the silicon material and form the set of fins.Type: GrantFiled: April 14, 2015Date of Patent: September 6, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: Johannes M. van Meer, Michael J. Hargrove, Christian Gruensfelder, Yanxiang Liu, Srikanth B. Samavedam
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Patent number: 9142674Abstract: Fin field-effect transistor devices and methods of forming the fin field-effect transistor devices are provided herein. In an embodiment, a fin field-effect transistor device includes a semiconductor substrate that has a fin. A gate electrode structure overlies the fin. Source and drain halo and/or extension regions and epitaxially-grown source regions and drain regions are formed in the fin and are disposed adjacent to the gate electrode structure. A body contact is disposed on a contact surface of the fin, and the body contact is spaced separately from the halo and/or extension regions and the epitaxially-grown source regions and drain regions.Type: GrantFiled: February 10, 2014Date of Patent: September 22, 2015Assignee: GLOBALFOUNDRIES, INC.Inventors: Yanxiang Liu, Michael Hargrove, Christian Gruensfelder
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Publication number: 20150221770Abstract: Approaches for enabling epitaxial growth of silicon fins in a device (e.g., a fin field effect transistor device (FinFET)) are provided. Specifically, approaches are provided for forming a set of silicon fins for a FinFET device, the FinFET device comprising: a set of gate structures formed over a substrate, each of the set of gate structures including a capping layer and a set of spacers; an oxide fill formed over the set of gate structures; a set of openings formed in the device by removing the capping layer and the set of spacers from one or more of the set of gate structures; a silicon material epitaxially grown within the set of openings in the device and then planarized; and wherein the oxide fill is etched to expose the silicon material and form the set of fins.Type: ApplicationFiled: April 14, 2015Publication date: August 6, 2015Applicant: GLOBALFOUNDRIES INC.Inventors: Johannes M. van Meer, Michael J. Hargrove, Christian Gruensfelder, Yanxiang Liu, Srikanth B. Samavedam
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Patent number: 9034737Abstract: Approaches for enabling epitaxial growth of silicon fins in a device (e.g., a fin field effect transistor device (FinFET)) are provided. Specifically, approaches are provided for forming a set of silicon fins for a FinFET device, the FinFET device comprising: a set of gate structures formed over a substrate, each of the set of gate structures including a capping layer and a set of spacers; an oxide fill formed over the set of gate structures; a set of openings formed in the device by removing the capping layer and the set of spacers from one or more of the set of gate structures; a silicon material epitaxially grown within the set of openings in the device and then planarized; and wherein the oxide fill is etched to expose the silicon material and form the set of fins.Type: GrantFiled: August 1, 2013Date of Patent: May 19, 2015Assignee: GLOBALFOUNDRIES Inc.Inventors: Johannes M. van Meer, Michael J. Hargrove, Christian Gruensfelder, Yanxiang Liu, Srikanth B. Samavedam
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Publication number: 20150034941Abstract: Integrated circuits that have a FinFET and methods of fabricating the integrated circuits are provided herein. In an embodiment, a method of fabricating an integrated circuit having a FinFET includes providing a substrate comprising fins. The fins include semiconductor material. A first metal oxide layer is formed over sidewall surfaces of the fins. The first metal oxide layer includes a first metal oxide. The first metal oxide layer is recessed to a depth below a top surface of the fins to form a recessed first metal oxide layer. The top surface and sidewall surfaces of the fins at a top portion of the fins are free from the first metal oxide layer. A gate electrode structure is formed over the top surface and sidewall surfaces of the fins at the top portion of the fins. The recessed first metal oxide layer is recessed beneath the gate electrode structure.Type: ApplicationFiled: July 31, 2013Publication date: February 5, 2015Applicant: GLOBALFOUNDRIES, Inc.Inventors: Michael HARGROVE, Yanxiang LIU, Christian GRUENSFELDER
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Publication number: 20150037945Abstract: Approaches for enabling epitaxial growth of silicon fins in a device (e.g., a fin field effect transistor device (FinFET)) are provided. Specifically, approaches are provided for forming a set of silicon fins for a FinFET device, the FinFET device comprising: a set of gate structures formed over a substrate, each of the set of gate structures including a capping layer and a set of spacers; an oxide fill formed over the set of gate structures; a set of openings formed in the device by removing the capping layer and the set of spacers from one or more of the set of gate structures; a silicon material epitaxially grown within the set of openings in the device and then planarized; and wherein the oxide fill is etched to expose the silicon material and form the set of fins.Type: ApplicationFiled: August 1, 2013Publication date: February 5, 2015Applicant: GLOBALFOUNDRIES Inc.Inventors: Johannes M. van Meer, Michael J. Hargrove, Christian Gruensfelder, Yanxiang Liu, Srikanth B. Samavedam
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Publication number: 20140264633Abstract: Fin field-effect transistor devices and methods of forming the fin field-effect transistor devices are provided herein. In an embodiment, a fin field-effect transistor device includes a semiconductor substrate that has a fin. A gate electrode structure overlies the fin. Source and drain halo and/or extension regions and epitaxially-grown source regions and drain regions are formed in the fin and are disposed adjacent to the gate electrode structure. A body contact is disposed on a contact surface of the fin, and the body contact is spaced separately from the halo and/or extension regions and the epitaxially-grown source regions and drain regions.Type: ApplicationFiled: February 10, 2014Publication date: September 18, 2014Applicant: GLOBALFOUNDRIES, Inc.Inventors: Yanxiang Liu, Michael Hargrove, Christian Gruensfelder
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Patent number: 8809178Abstract: One illustrative method disclosed herein includes forming a plurality of spaced-apart trenches in a semiconducting substrate to thereby define a fin structure for the device, forming a local isolation region within each of the trenches, forming a sacrificial gate structure on the fin structure, wherein the sacrificial gate structure comprises at least a sacrificial gate electrode, and forming a layer of insulating material above the fin structure and within the trench above the local isolation region. In this example, the method further includes performing at least one etching process to remove the sacrificial gate structure to thereby define a gate cavity, after removing the sacrificial gate structure, performing at least one etching process to form a recess in the local isolation region, and forming a replacement gate structure that is positioned in the recess in the local isolation region and in the gate cavity.Type: GrantFiled: February 29, 2012Date of Patent: August 19, 2014Assignee: GLOBALFOUNDRIES Inc.Inventors: Yanxiang Liu, Michael Hargrove, Xiaodong Yang, Hans van Meer, Laegu Kang, Christian Gruensfelder, Srikanth Samavedam
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Publication number: 20130224945Abstract: One illustrative method disclosed herein includes forming a plurality of spaced-apart trenches in a semiconducting substrate to thereby define a fin structure for the device, forming a local isolation region within each of the trenches, forming a sacrificial gate structure on the fin structure, wherein the sacrificial gate structure comprises at least a sacrificial gate electrode, and forming a layer of insulating material above the fin structure and within the trench above the local isolation region. In this example, the method further includes performing at least one etching process to remove the sacrificial gate structure to thereby define a gate cavity, after removing the sacrificial gate structure, performing at least one etching process to form a recess in the local isolation region, and forming a replacement gate structure that is positioned in the recess in the local isolation region and in the gate cavity.Type: ApplicationFiled: February 29, 2012Publication date: August 29, 2013Applicant: GLOBALFOUNDRIES Inc.Inventors: Yanxiang Liu, Michael Hargrove, Xiaodong Yang, Hans Van Meer, Laegu Kang, Christian Gruensfelder, Srikanth Samavedam