Patents by Inventor Christian H. Wolters
Christian H. Wolters has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8817250Abstract: A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.Type: GrantFiled: September 6, 2011Date of Patent: August 26, 2014Assignee: KLA-Tencor CorporationInventors: Paul Doyle, Guoheng Zhao, Alexander Belyaev, Christian H. Wolters, Howard W. Dando, Mehdi Vaez-Iravani, Carmela C. Moreno
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Publication number: 20120062877Abstract: A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.Type: ApplicationFiled: September 6, 2011Publication date: March 15, 2012Applicant: KLA-TENCOR CORPORATIONInventors: Paul Doyle, Guoheng Zhao, Alexander Belyaev, J. Rex Runyon, Christian H. Wolters, Howard W. Dando, Mehdi Vaez-Iravani
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Patent number: 8042254Abstract: An edge-handling chuck, a system for holding and rotating a test substrate at a high speed and a method for chucking a rotating substrate are disclosed. The Chuck includes a plate having a central axis, a fluid opening and a top surface with a varied topography characterized by symmetry about the central axis. The topography is such that a volume flow rate of fluid between the fluid opening and a periphery of the top surface sufficient to counteract substrate sagging is significantly less than a volume flow rate needed for a similar but flat-surfaced chuck to similarly counteract such sagging. The system may further include a spindle motor and a gas system that supplies gas through the fluid opening to a gap between the top surface and a back surface of the substrate. A radial velocity of the fluid through the gap is approximately constant.Type: GrantFiled: December 21, 2007Date of Patent: October 25, 2011Assignee: KLA-Tencor CorporationInventors: Alexander Belyaev, Christian H. Wolters, Aleksey Petrenko, Paul Doyle
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Patent number: 7777875Abstract: Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. The step of detecting may include monitoring an anode current of the PMT detector, and detecting features, defects or light scattering properties of the specimen using the anode current until the anode current reaches a predetermined threshold. Thereafter, the method may use a dynode current of the PMT for detecting the features, defects or light scattering properties of the specimen.Type: GrantFiled: August 18, 2008Date of Patent: August 17, 2010Assignee: KLA-Tencor Technologies Corp,Inventors: Christian H. Wolters, Anatoly Romanovsky, Alexander Slobodov
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Patent number: 7746462Abstract: An inspection system and method is provided herein for increasing the detection range of the inspection system. According to one embodiment, the inspection system may include a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, and a voltage divider network coupled for extending the detection range of the photodetector (and thus, the detection range of the inspection system) by saturating at least one of the stages. This forces the photodetector to operate in a non-linear manner. However, measurement inaccuracies are avoided by calibrating the photodetector output to remove any non-linear effects that may be created by intentionally saturating the at least one of the stages. In one example, a table of values may be generated during a calibration phase to convert the photodetector output into an actual amount of scattered light.Type: GrantFiled: May 21, 2007Date of Patent: June 29, 2010Assignee: KLA-Tencor Technologies CorporationInventors: Zhongping Cai, Alexander Slobodov, Anatoly Romanovsky, Christian H. Wolters
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Patent number: 7671982Abstract: Inspection systems, circuits, and methods are provided to enhance defect detection by reducing thermal damage to large particles by dynamically altering the incident laser beam power level supplied to the specimen during a surface inspection scan. In one embodiment, an inspection system includes an illumination subsystem for directing light to a specimen at a first power level, a detection subsystem for detecting light scattered from the specimen, and a power attenuator subsystem for dynamically altering the power level directed to the specimen based on the scattered light detected from the specimen. The power attenuator subsystem may reduce the directed light to a second power level, which is lower than the first, if the detected scattered light exceeds a predetermined threshold level. The systems and methods described herein may also be used to extend the measurement detection range of an inspection system by providing a variable-power inspection system.Type: GrantFiled: October 14, 2008Date of Patent: March 2, 2010Assignee: KLA-Tencor Technologies Corp.Inventors: Christian H. Wolters, Anatoly Romanovsky
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Patent number: 7607647Abstract: Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.Type: GrantFiled: March 20, 2007Date of Patent: October 27, 2009Assignee: KLA-Tencor Technologies CorporationInventors: Guoheng Zhao, Alexander Belyaev, Christian H. Wolters, Paul Andrew Doyle, Howard W. Dando, Mehdi Vaez-Iravani
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Publication number: 20090096505Abstract: Inspection systems, circuits, and methods are provided to enhance defect detection by reducing thermal damage to large particles by dynamically altering the incident laser beam power level supplied to the specimen during a surface inspection scan. In one embodiment, an inspection system includes an illumination subsystem for directing light to a specimen at a first power level, a detection subsystem for detecting light scattered from the specimen, and a power attenuator subsystem for dynamically altering the power level directed to the specimen based on the scattered light detected from the specimen. For example, the power attenuator subsystem may reduce the directed light to a second power level, which is lower than the first, if the detected scattered light exceeds a predetermined threshold level. In addition reducing thermal damage, the systems and methods described herein may be used to extend the measurement detection range of an inspection system by providing a variable-power inspection system.Type: ApplicationFiled: October 14, 2008Publication date: April 16, 2009Applicant: KLA-TENCOR TECHNOLOGIES CORPORATIONInventors: Christian H. Wolters, Anatoly Romanovsky
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Publication number: 20090040511Abstract: Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. The step of detecting may include monitoring an anode current of the PMT detector, and detecting features, defects or light scattering properties of the specimen using the anode current until the anode current reaches a predetermined threshold. Thereafter, the method may use a dynode current of the PMT for detecting the features, defects or light scattering properties of the specimen.Type: ApplicationFiled: August 18, 2008Publication date: February 12, 2009Applicant: KLA-TENCOR TECHNOLOGIES CORPORATIONInventors: Christian H. Wolters, Anatoly Romanovsky, Alexander Slobodov
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Publication number: 20080291454Abstract: An inspection system and method is provided herein for increasing the detection range of the inspection system. According to one embodiment, the inspection system may include a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, and a voltage divider network coupled for extending the detection range of the photodetector (and thus, the detection range of the inspection system) by saturating at least one of the stages. This forces the photodetector to operate in a non-linear manner. However, measurement inaccuracies are avoided by calibrating the photodetector output to remove any non-linear effects that may be created by intentionally saturating the at least one of the stages. In one example, a table of values may be generated during a calibration phase to convert the photodetector output into an actual amount of scattered light.Type: ApplicationFiled: May 21, 2007Publication date: November 27, 2008Applicant: KLA-TENCOR TECHNOLOGIES CORP.Inventors: Zhongping Cai, Alexander Slobodov, Anatoly Romanovsky, Christian H. Wolters
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Patent number: 7436508Abstract: Inspection systems, circuits, and methods are provided to enhance defect detection by reducing thermal damage to large particles by dynamically altering the incident laser beam power level supplied to the specimen during a surface inspection scan. In one embodiment, an inspection system includes an illumination subsystem for directing light to a specimen at a first power level, a detection subsystem for detecting light scattered from the specimen, and a power attenuator subsystem for dynamically altering the power level directed to the specimen based on the scattered light detected from the specimen. For example, the power attenuator subsystem may reduce the directed light to a second power level, which is lower than the first, if the detected scattered light exceeds a predetermined threshold level. In addition reducing thermal damage, the systems and methods described herein may be used to extend the measurement detection range of an inspection system by providing a variable-power inspection system.Type: GrantFiled: July 14, 2005Date of Patent: October 14, 2008Assignee: KLA-Tencor Technologies Corp.Inventors: Christian H. Wolters, Anatoly Romanovsky
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Publication number: 20080229811Abstract: Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.Type: ApplicationFiled: March 20, 2007Publication date: September 25, 2008Applicant: KLA-Tencor Technologies CorporationInventors: Guoheng Zhao, Alexander Belyaev, Christian H. Wolters, Paul Andrew Doyle, Howard W. Dando, Mehdi Vaez-Iravani
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Patent number: 7423250Abstract: Inspection systems, circuits and methods are provided to enhance defect detection by addressing saturation levels of the amplifier and analog-digital circuitry as a limiting factor of the measurement detection range of an inspection system. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. However, the step of detecting may use only one photodetector for detecting the light scattered from the specimen and for converting the light into an electrical signal. The step of detecting also includes generating a first signal and a second signal in response to the electrical signal, where the second signal differs from the first. For example, the first signal may be generated to have a higher resolution than the second signal for detecting substantially lower levels of the scattered light.Type: GrantFiled: July 14, 2005Date of Patent: September 9, 2008Assignee: KLA-Tencor Technologies Corp.Inventors: Christian H. Wolters, Anatoly Romanovsky, Alexander Slobodov
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Patent number: 7414715Abstract: Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. The step of detecting may include monitoring an anode current of the PMT detector, and detecting features, defects or light scattering properties of the specimen using the anode current until the anode current reaches a predetermined threshold. Thereafter, the method may use a dynode current of the PMT for detecting the features, defects or light scattering properties of the specimen.Type: GrantFiled: July 14, 2005Date of Patent: August 19, 2008Assignee: KLA-Tencor Technologies Corp.Inventors: Christian H. Wolters, Anatoly Romanovsky, Alexander Slobodov
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Patent number: 5858926Abstract: The present invention is directed to a process for preparing a HgBaCaCuO superconductor by annealing a precursor mixture comprising a lower member of the homologous HgBaCaCuO superconductor series, a source of calcium and a source of copper. The precursor mixture may further comprise a source of oxygen, a source of rhenium, and, if desired, a source of an additional element selected from the group consisting of halogens and metals other than mercury, barium, calcium, copper and rhenium. The process is particularly effective for preparing (Hg.sub.1-x,Re.sub.x)Ba.sub.2 Ca.sub.2 Cu.sub.3 O.sub.8-y by annealing a precursor mixture containing (Hg.sub.1-x,Re.sub.x)Ba.sub.2 Ca.sub.1 Cu.sub.2 O.sub.6-y at a temperature below about 850.degree. C., wherein x ranges up to about 0.25 and y is a rational number ranging from about negative 1 to about positive 1.Type: GrantFiled: August 23, 1996Date of Patent: January 12, 1999Assignee: Florida State UniversityInventors: Justin Schwartz, Christian H. Wolters, Kathleen M. Amm
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Patent number: PP10308Abstract: A new and distinct variety of Rosemary, Rosmarinus officinalis, was discovered while growing in a planting area located at Guildford, Surrey, England containing plants of the same species. The origin at the new plant otherwise is unknown. The new variety exhibits distinctive decorative lance-shaped bicolored leaves of pale green and white. Good winter hardiness and resistance to diseases have been observed to date. The new variety propagates well from cuttings and is particularly well suited for serving ornamental as well as culinary uses.Type: GrantFiled: July 2, 1996Date of Patent: March 31, 1998Inventors: Christine P. Wolters, Christian H. Wolters