Abstract: The present invention relates to a filter substrate for filtering and optically characterizing microparticles. The filter substrate comprises a wafer having a thickness of at least 100 pm and a transmittance of at least 10% for radiation in the wavelength range of 2500 nm to 15000 nm. Furthermore, the surface of the front side and/or the surface of the rear side of the wafer is completely or partially provided with an antireflective layer, which prevents the optical reflection of radiation in the wavelength range of 200 nm to 10000 nm. Moreover, the wafer has, at least in some regions, filter holes having a diameter of 1 pm to 5 mm. With the filter substrate according to the invention, microparticles can be filtered and the microparticles on the filter substrate can be subsequently optically characterized with very high measurement quality.

Abstract: The invention relates to a method for improving the ohmic-contact behaviour between a contact grid and an emitter layer of a silicon solar cell, in which, in a treatment step, a treatment current flow having a current density of 200 A/cm2 to 20,000 A/cm2 in relation to the treatment section is induced while biasing and illuminating the silicon solar cell. The object of the invention is to improve the method for improving the ohmic-contact behaviour between a contact grid and an emitter layer of a silicon solar cell. In particular, it should be possible to quantify the improvement achieved by the method while implementing the method. Furthermore, any damage resulting from the application of unfavourable process parameters should be detected while the method is being implemented.

Abstract: The present invention relates to a filter substrate for filtering and optically characterizing microparticles. The filter substrate comprises a wafer having a thickness of at least 100 pm and a transmittance of at least 10% for radiation in the wavelength range of 2500 nm to 15000 nm. Furthermore, the surface of the front side and/or the surface of the rear side of the wafer is completely or partially provided with an antireflective layer, which prevents the optical reflection of radiation in the wavelength range of 200 nm to 10000 nm. Moreover, the wafer has, at least in some regions, filter holes having a diameter of 1 pm to 5 mm. With the filter substrate according to the invention, microparticles can be filtered and the microparticles on the filter substrate can be subsequently optically characterized with very high measurement quality.