Abstract: A system includes a multi-beam particle microscope for imaging a 3D sample layer by layer, and a computer system with a multi-tier architecture is disclosed. The multi-tier architecture can allow for an optimized image processing by gradually reducing the amount of parallel processing speed when data exchange between different processing systems and/or of data originating from different detection channels takes place. A method images a 3D sample layer by layer. A computer program product includes a program code for carrying out the method.

Abstract: A microscope system having a plurality of microscope modules connected to one another for data transfer purposes. The microscope system includes a central clock generator, the clock signal of which is provided to all microscope modules. The microscope modules are configured to use the clock signal or a clock derived therefrom as an internal clock. Moreover, a corresponding method for operating such a microscope system is described.

Abstract: A method for timing procedures in a microscope system, which has a plurality of microscope modules configured to carry out various processes, provision is made for a clock signal to be provided to all microscope modules by a central clock generator and for the clock signal to be modulated by a clock modulation circuit in order to produce a defined clock-pulse number. The microscope modules define a start time for carrying out a process by way of the clock-pulse number, carrying out the process as soon as the clock-pulse number is reached. Moreover, a corresponding microscope system is described.