Abstract: The present invention provides a method, an optical inspection apparatus as well as a computer program product for optical inspection of a surface. The optical inspection apparatus can be effectively applied for optical inspection of periodic structures on e.g. a semi-conductor wafer for the purpose of quality control. By effectively splitting a light beam into a plurality of spatially separated light beams and by selective usage of these light beams, various surface segments of the surface can be inspected simultaneously by superposition of respective images. A resulting superposition image can then be compared with a reference image for detection of defects of the surface.

Abstract: The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of generating of first and second coherent light beams, reflecting at least the first coherent light beam from the first region into a first return beam and reflecting the second coherent light beam from a second region into a second return beam, measuring at least a first reflectivity of the first region, determining a topography-dependent phase shift of the first and second return beams for the height measurement based on the first reflectivity.

Abstract: The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of generating of first and second coherent light beams, reflecting at least the first coherent light beam from the first region into a first return beam and reflecting the second coherent light beam from a second region into a second return beam, measuring at least a first reflectivity of the first region, determining a topography-dependent phase shift of the first and second return beams for the height measurement based on the first reflectivity.

Abstract: An automated system for illuminating and inspecting the inner surface areas of tubular samples, especially stents, is disclosed. The system comprises rotatable means for receiving the sample to be inspected; at least one fluorescent surface area arranged in the immediate vicinity of the sample to be inspected; an UV-light source for illuminating the at least one fluorescent surface area; an electronic line-scan camera for inspecting the sample; and a computer based electronic imaging system, functionally connected to the camera, whereby the imaging system creates a line-by-line image of an area extending along the length of the sample as it rotates under the camera.

Abstract: The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of generating of first and second coherent light beams, reflecting at least the first coherent light beam from the first region into a first return beam and reflecting the second coherent light beam from a second region into a second return beam, measuring at least a first reflectivity of the first region, determining a topography-dependent phase shift of the first and second return beams for the height measurement based on the first reflectivity.

Abstract: The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of generating of first and second coherent light beams, reflecting at least the first coherent light beam from the first region into a first return beam and reflecting the second coherent light beam from a second region into a second return beam, measuring at least a first reflectivity of the first region, determining a topography-dependent phase shift of the first and second return beams for the height measurement based on the first reflectivity.

Abstract: A system and method for interferometric height measurement. A first coherent light beam and a second coherent light beam is generated. At least the first coherent light beam is reflected from a first region into a first return beam and the second coherent light beam is reflected from a second region into a second return beam. At least a first reflectivity of the first region is measured. A topography-dependent phase shift of the first return beam and the second return beam is determined with reference to a curve relating the first reflectivity to a material-dependent phase shift. A height based on the topography-dependent phase shift is measured.

Abstract: An automated system for illuminating and inspecting the inner surface areas of tubular samples, especially stents, is disclosed. The system comprises rotatable means for receiving the sample to be inspected; at least one fluorescent surface area arranged in the immediate vicinity of the sample to be inspected; an UV-light source for illuminating the at least one fluorescent surface area; an electronic line-scan camera for inspecting the sample; and a computer based electronic imaging system, functionally connected to the camera, whereby the imaging system creates a line-by-line image of an area extending along the length of the sample as it rotates under the camera.

Abstract: An automated system for illuminating and inspecting the inner surface areas of tubular samples, especially stents, is disclosed. The system comprises rotatable means for receiving the sample to be inspected; at least one fluorescent surface area arranged in the immediate vicinity of the sample to be inspected; an UV-light source for illuminating the at least one fluorescent surface area; an electronic line-scan camera for inspecting the sample; and a computer based electronic imaging system, functionally connected to the camera, whereby the imaging system creates a line-by-line image of an area extending along the length of the sample as it rotates under the camera.

Abstract: The invention relates to a system and method of detecting impurities in a cylindrically shaped transparent medium, wherein the cylindrically shaped transparent medium is illuminated with electromagnetic radiation, and the radiation having components emerging radially from the medium, and at least some of the components are received by a detector for detecting impurities of the medium. The components are detected at a multiplicity of relative angular positions around the symmetry axis of the cylinder, so as to form an impurity diagram that may be analyzed to detect and measure impurities in the medium.

Abstract: A polarizing beamsplitter is provided, comprising two wedge-shaped prisms of a birefringent material, the prisms forming a plan-parallel plate, wherein an incident light beam is separated into two partial beams being arranged parallel to the incident beam when emerging from the beamsplitter, the partial beams having a lateral distance with respect to each other, which is continuously changeable.

Abstract: The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of generating of first and second coherent light beams, reflecting at least the first coherent light beam from the first region into a first return beam and reflecting the second coherent light beam from a second region into a second return beam, measuring at least a first reflectivity of the first region, determining a topography-dependent phase shift of the first and second return beams for the height measurement based on the first reflectivity.

Abstract: A polarizing beamsplitter is provided, comprising two wedge-shaped prisms of a birefringent material, the prisms forming a plan-parallel plate, wherein an incident light beam is separated into two partial beams being arranged parallel to the incident beam when emerging from the beamsplitter, the partial beams having a lateral distance with respect to each other, which is continuously changeable.

Abstract: The present invention provides a method, an optical inspection apparatus as well as a computer program product for optical inspection of a surface. The optical inspection apparatus can be effectively applied for optical inspection of periodic structures on e.g. a semi-conductor wafer for the purpose of quality control. By effectively splitting a light beam into a plurality of spatially separated light beams and by selective usage of these light beams, various surface segments of the surface can be inspected simultaneously by superposition of respective images. A resulting superposition image can then be compared with a reference image for detection of defects of the surface.

Abstract: A polarizing beamsplitter is provided, comprising two wedge-shaped prisms of a birefringent material, the prisms forming a plan-parallel plate, wherein an incident light beam is separated into two partial beams being arranged parallel to the incident beam when emerging from the beamsplitter, the partial beams having a lateral distance with respect to each other, which is continuously changeable.

Abstract: The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of generating of first and second coherent light beams, reflecting at least the first coherent light beam from the first region into a first return beam and reflecting the second coherent light beam from a second region into a second return beam, measuring at least a first reflectivity of the first region, determining a topography-dependent phase shift of the first and second return beams for the height measurement based on the first reflectivity.

Abstract: An optical device has a rotatable birefringent crystal. The crystal is rotatable around a first axis (4; 42) and has a crystallographic-optical axis (6; 44) in a plane that is perpendicular to the first axis. In addition, the crystal is rotated around the first axis in order to control a displacement (?x) of a light beam in the plane when the light beam is polarized within the plane and directed onto the crystal.

Abstract: An automated system for illuminating and inspecting the inner surface areas of tubular samples, especially stents, is disclosed. The system comprises rotatable means for receiving the sample to be inspected; at least one fluorescent surface area arranged in the immediate vicinity of the sample to be inspected; an UV-light source for illuminating the at least one fluorescent surface area; an electronic line-scan camera for inspecting the sample; and a computer based electronic imaging system, functionally connected to the camera, whereby the imaging system creates a line-by-line image of an area extending along the length of the sample as it rotates under the camera.

Abstract: A method and a measurement system to provide an in situ measurement of the thickness of a layer deposited on a substrate is described. The measurement system includes the optical sensor integrated into a movable element hovering over the substrate in close proximity to the layer. The optical sensor element is adapted to emit and detect optical signals. The measurement system provides an optical, and thus contactless approach to determine the thickness of the layer during the growth of the layer. The inventive measurement system is particularly suited for an electroplating system and process.

Abstract: A polarizing beamsplitter is provided, comprising two wedge-shaped prisms of a birefringent material, the prisms forming a plan-parallel plate, wherein an incident light beam is separated into two partial beams being arranged parallel to the incident beam when emerging from the beamsplitter, the partial beams having a lateral distance with respect to each other, which is continuously changeable.