Patents by Inventor Christian W. Valencia

Christian W. Valencia has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240191353
    Abstract: Embodiments of the disclosure relate to methods for reducing metal oxide layers to pure metal using microwave radiation. Specific embodiments provide methods of reducing a native metal oxide on a metal interconnect within a substrate feature comprising dielectric sidewalls. In some embodiments, surrounding dielectric materials are undamaged by the disclosed processes.
    Type: Application
    Filed: December 7, 2022
    Publication date: June 13, 2024
    Applicant: Applied Materials, Inc.
    Inventors: Yoon Ah Shin, Bencherki Mebarki, Joung Joo Lee, Xianmin Tang, Thai Cheng Chua, Christian W. Valencia
  • Publication number: 20230017035
    Abstract: A method of forming graphene layers is disclosed. The method includes precleaning the substrate with a plasma formed from an argon- and hydrogen-containing gas, followed by forming a graphene layer by exposing the substrate to a microwave plasma to form a graphene layer on the substrate. The microwave plasma comprises hydrocarbon and hydrogen radicals. The substrate is then cooled. A capping layer may also be formed.
    Type: Application
    Filed: June 20, 2022
    Publication date: January 19, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Bencherki Mebarki, Thai Cheng Chua, Christian W. Valencia, Joung Joo Lee, Xianmin Tang, Xiao Chen