Patents by Inventor Christian Zengerling

Christian Zengerling has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Holding Device for an Optical Element in an Objective
    Publication number: 20150138520
    Abstract: A holding device for an optical element in an objective has a mount that is connected to the objective, on the one hand, and at least indirectly to the optical element, on the other hand. Arranged between the mount and the optical element is a reinforcing element whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element.
    Type: Application
    Filed: October 1, 2014
    Publication date: May 21, 2015
    Inventors: Bernhard Gellrich, Andreas Wurmbrand, Jens Kugler, Armin Schoeppach, Christian Zengerling, Stephane Bruynooghe
  • Holding device for an optical element in an objective
    Patent number: 8854602
    Abstract: A holding device for an optical element in an objective has a mount that is connected to the objective, on the one hand, and at least indirectly to the optical element, on the other hand. Arranged between the mount and the optical element is a reinforcing element whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element.
    Type: Grant
    Filed: November 22, 2004
    Date of Patent: October 7, 2014
    Assignees: ASML Netherlands B.V., Carl Zeiss SMT GmbH
    Inventors: Bernhard Gellrich, Andreas Wurmbrand, Jens Kugler, Armin Schoeppach, Christian Zengerling, Stephane Bruynooghe
  • Device for preventing the displacement of an optical element
    Patent number: 7564636
    Abstract: In a device for preventing the creeping of an optical element, in particular a lens or a mirror, the optical element is connected to a mount via connecting members arranged on the circumference of the optical element. The position of the optical element in an objective (PL) deviates from the vertical axial position. In order to compensate the dead weight at least of the optical element at least one holding element via which the optical element is held on a housing part of the objective (PL) is provided in addition to the connecting members.
    Type: Grant
    Filed: August 20, 2004
    Date of Patent: July 21, 2009
    Assignee: Carl Zeiss SMT AG
    Inventors: Christian Zengerling, Armin Schoeppach, Ulrich Weber
  • Holding Device for an Optical Element in an Objective
    Publication number: 20080002170
    Abstract: A holding device for an optical element in an objective has a mount that is connected to the objective, on the one hand, and at least indirectly to the optical element, on the other hand. Arranged between the mount and the optical element is a reinforcing element whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element.
    Type: Application
    Filed: November 22, 2004
    Publication date: January 3, 2008
    Inventors: Bernhard Gellrich, Andreas Wurmbrand, Jens Kugler, Armin Schoeppach, Christian Zengerling, Stephane Bruynooghe
  • Device for preventing the displacement of an optical element
    Publication number: 20070183063
    Abstract: In a device (1) for preventing the creeping of an optical element (2), in particular a lens or a mirror, the optical element (2) is connected to a mount (3) via connecting members (4) arranged on the circumference of the optical element (2). The position of the optical element (2) in an objective (PL) deviates from the vertical axial position. In order to compensate the dead weight at least of the optical element (2) at least one holding element (7) via which the optical element (2) is held on a housing part of the objective (PL) is provided in addition to the connecting members (4).
    Type: Application
    Filed: August 20, 2004
    Publication date: August 9, 2007
    Inventors: Christian Zengerling, Armin Schoeppach, Ulrich Weber