Abstract: A battery cell holder. The battery cell holder includes: a housing made of an inelastic material, which is configured to receive a plurality of individual battery cells; an elastic intermediate unit having a plurality of passthrough openings, each passthrough opening being configured to receive one battery cell; and a preload device that is configured to exert a preload force on the elastic intermediate unit in such a way that the elastic intermediate unit becomes elastically deformed in order to clamp the battery cells.

Abstract: A battery system includes at least one battery apparatus having at least one apparatus for increasing safety when using a degassing apparatus. The degassing apparatus is suitable for the controlled degassing of battery apparatuses. The battery apparatus and the apparatus are surrounded by a housing. The degassing apparatus is inserted into a wall of a housing. The apparatus generates a physical distance between the battery apparatus and the degassing apparatus such that a space is kept free between the battery apparatus and the degassing apparatus for discharging substances, which emerge from the battery apparatus, to an area surrounding the battery system.

Abstract: A method for manufacturing a multi-layer MEMS component includes: providing a multi-layer substrate that has a monocrystalline carrier layer, a monocrystalline functional layer having a front side and a back side, and a bonding layer located between the back side and the carrier layer; growing a first polycrystalline layer over the front side of the monocrystalline functional layer; removing the monocrystalline carrier layer; and growing a second polycrystalline layer over the back side of the monocrystalline functional layer.

Abstract: A method for manufacturing a multi-layer MEMS component includes: providing a multi-layer substrate that has a monocrystalline carrier layer, a monocrystalline functional layer having a front side and a back side, and a bonding layer located between the back side and the carrier layer; growing a first polycrystalline layer over the front side of the monocrystalline functional layer; removing the monocrystalline carrier layer; and growing a second polycrystalline layer over the back side of the monocrystalline functional layer.

Abstract: An electrochemical energy store (10), comprising a housing (12) for accommodating at least one cell unit (24), wherein the housing (12) forms a receptacle space for the arrangement of the cell unit (24), wherein a surface (17) of the housing (12) facing the receptacle space is completely covered by an electrically insulating material (27), wherein the housing (12) also comprises an opening (20) for filling a fluid electrolyte into the receptacle space, and wherein the opening (20) is covered by two overlapping end regions (26, 28) of the electrically insulating material (27). An energy store (10) according to the invention permits a simple means of bringing about sealed internal insulation of a housing (12) accompanied by simultaneously improved manufacturability.

Abstract: An etching device and an etching method. The etching device includes an etching chamber and a chuck located therein for clamping a substrate to be etched, a plasma generating device surrounding the etching chamber in an area and a gas nozzle distribution device for introducing etching gas, which is situated above the chuck in such a way that an etching gas stream is directed essentially perpendicular to a surface of the substrate to be etched. A moving mechanism may be used to change the distance between the gas nozzle distribution device and the chuck as a function of the etching mode.

Abstract: A method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure. The method includes provision of a carrier substrate including a first surface, an application of an insulation layer onto the first surface, an epitaxial growth of a first silicon layer onto the insulation layer, a structuring of the first silicon layer for forming trenches in the first silicon layer, a passivation of the first silicon layer, whereby the trenches are filled and a passivation layer is formed on a side facing away from the first surface, a structuring of the passivation layer, sacrificial areas and functional areas being formed in the first silicon layer, and the sacrificial areas are free of the passivation layer, at least at some points, on a side facing away from the carrier substrate, and, finally, removal of the sacrificial areas.

Abstract: A battery system (BS), containing at least one battery device (BV) and at least one operating device (BTV) for operation of the battery system (BS) and/or of the at least one battery device (BV), and at least one further device (V), wherein the at least one further device (V) is intended to create a physical distance between two component parts of the battery system (BS) and in particular between the at least one battery device (BV) and a further component (K) of the battery system (BS), or between at least two component parts of the at least one battery device (BV), wherein the at least one operating device (BTV) is arranged at least partially within the at least one further device (V).

Abstract: An etching device and an etching method. The etching device includes an etching chamber and a chuck located therein for clamping a substrate to be etched, a plasma generating device surrounding the etching chamber in an area and a gas nozzle distribution device for introducing etching gas, which is situated above the chuck in such a way that an etching gas stream is directed essentially perpendicular to a surface of the substrate to be etched. A moving mechanism may be used to change the distance between the gas nozzle distribution device and the chuck as a function of the etching mode.

Abstract: A battery system includes at least one battery apparatus having at least one apparatus for increasing safety when using a degassing apparatus. The degassing apparatus is suitable for the controlled degassing of battery apparatuses. The battery apparatus and the apparatus are surrounded by a housing. The degassing apparatus is inserted into a wall of a housing. The apparatus generates a physical distance between the battery apparatus and the degassing apparatus such that a space is kept free between the battery apparatus and the degassing apparatus for discharging substances, which emerge from the battery apparatus, to an area surrounding the battery system.

Abstract: A method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure. The method includes provision of a carrier substrate including a first surface, an application of an insulation layer onto the first surface, an epitaxial growth of a first silicon layer onto the insulation layer, a structuring of the first silicon layer for forming trenches in the first silicon layer, a passivation of the first silicon layer, whereby the trenches are filled and a passivation layer is formed on a side facing away from the first surface, a structuring of the passivation layer, sacrificial areas and functional areas being formed in the first silicon layer, and the sacrificial areas are free of the passivation layer, at least at some points, on a side facing away from the carrier substrate, and, finally, removal of the sacrificial areas.

Abstract: A battery system (BS), containing at least one battery device (BV) and at least one operating device (BTV) for operation of the battery system (BS) and/or of the at least one battery device (BV), and at least one further device (V), wherein the at least one further device (V) is intended to create a physical distance between two component parts of the battery system (BS) and in particular between the at least one battery device (BV) and a further component (K) of the battery system (BS), or between at least two component parts of the at least one battery device (BV), wherein the at least one operating device (BTV) is arranged at least partially within the at least one further device (V).

Abstract: An electrochemical energy store (10), comprising a housing (12) for accommodating at least one cell unit (24), wherein the housing (12) forms a receptacle space for the arrangement of the cell unit (24), wherein a surface (17) of the housing (12) facing the receptacle space is completely covered by an electrically insulating material (27), wherein the housing (12) also comprises an opening (20) for filling a fluid electrolyte into the receptacle space, and wherein the opening (20) is covered by two overlapping end regions (26, 28) of the electrically insulating material (27). An energy store (10) according to the invention permits a simple means of bringing about sealed internal insulation of a housing (12) accompanied by simultaneously improved manufacturability.