Abstract: Methods of forming a contact in two or more portions and a contact so formed are disclosed. One method includes providing a device including a silicide region; and forming a contact to the silicide region by: first forming a lower contact portion to the silicide region through a first dielectric layer, and second forming an upper contact portion to the lower contact portion through a second dielectric layer over the first dielectric layer. A contact may include a first contact portion contacting a silicide region, the first contact portion having a width less than 100 nm; and a second contact portion coupled to the first contact portion from above, the second contact portion having a width greater than the width of the first contact portion.

Abstract: A semiconductor structure includes a semiconductor layer that includes an inverted V shaped channel region that allows avoidance of a raised source/drain region within the semiconductor structure. In one embodiment, a generally conventional gate electrode is located over a planar surface of the semiconductor layer over the inverted V shaped channel region. In another embodiment, the foregoing generally conventional gate electrode is used in conjunction with an inverted V shaped gate electrode that is located within an inverted V shaped notch that comprises the inverted V shaped channel region.

Abstract: A semiconductor structure includes a semiconductor layer that includes an inverted V shaped channel region that allows avoidance of a raised source/drain region within the semiconductor structure. In one embodiment, a generally conventional gate electrode is located over a planar surface of the semiconductor layer over the inverted V shaped channel region. In another embodiment, the foregoing generally conventional gate electrode is used in conjunction with an inverted V shaped gate electrode that is located within an inverted V shaped notch that comprises the inverted V shaped channel region.