Patents by Inventor Christof SINGLE

Christof SINGLE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacturing method for a piezoelectric layer arrangement and corresponding piezoelectric layer arrangement
    Patent number: 9461234
    Abstract: A manufacturing method is provided for a piezoelectric layer arrangement and a corresponding piezoelectric layer arrangement. The manufacturing method includes the steps: depositing a first electrode layer on a substrate; depositing a first insulating layer on the first electrode layer; forming a through opening in the first insulating layer to expose the first electrode layer within the through opening; depositing a piezoelectric layer on the first insulating layer and on the first electrode layer within the through opening; back-polishing the resulting structure to form a planar surface, on which a piezoelectric layer area, surrounded by the first insulating layer, is exposed; and depositing and structuring a second electrode layer on the first insulating layer, which contacts the piezoelectric layer area.
    Type: Grant
    Filed: July 30, 2015
    Date of Patent: October 4, 2016
    Assignee: ROBERT BOSCH GMBH
    Inventors: Thomas Mayer, Juergen Butz, Rainer Straub, Jochen Tomaschko, Christof Single
  • MANUFACTURING METHOD FOR A PIEZOELECTRIC LAYER ARRANGEMENT AND CORRESPONDING PIEZOELECTRIC LAYER ARRANGEMENT
    Publication number: 20160035959
    Abstract: A manufacturing method is provided for a piezoelectric layer arrangement and a corresponding piezoelectric layer arrangement. The manufacturing method includes the steps: depositing a first electrode layer on a substrate; depositing a first insulating layer on the first electrode layer; forming a through opening in the first insulating layer to expose the first electrode layer within the through opening; depositing a piezoelectric layer on the first insulating layer and on the first electrode layer within the through opening; back-polishing the resulting structure to form a planar surface, on which a piezoelectric layer area, surrounded by the first insulating layer, is exposed; and depositing and structuring a second electrode layer on the first insulating layer, which contacts the piezoelectric layer area.
    Type: Application
    Filed: July 30, 2015
    Publication date: February 4, 2016
    Inventors: Thomas MAYER, Juergen BUTZ, Rainer STRAUB, Jochen TOMASCHKO, Christof SINGLE