Patents by Inventor Christofer C Helwig

Christofer C Helwig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process control apparatus, systems, and methods
    Patent number: 6999848
    Abstract: An apparatus and a system, as well as a method and article, may operate to receive a critical dimension associated with each wafer included in a lot of wafers at a station controller coupled to a metrology tool, calculate a modified recipe time associated with each wafer in the lot based on the critical dimension and a base time, and send the modified recipe time in a message to a station controller coupled to an etch tool to process each of the wafers included in the lot.
    Type: Grant
    Filed: December 19, 2003
    Date of Patent: February 14, 2006
    Assignee: Intel Corporation
    Inventor: Christofer C Helwig