Patents by Inventor Christoper Beaudry

Christoper Beaudry has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS AND SYSTEMS FOR PERFORMING IMMERSION PROCESSING DURING LITHOGRAPHY
    Publication number: 20080050679
    Abstract: A method of processing a substrate includes forming a coating layer over a front surface of the substrate and exposing the coating layer in an immersion scanner. The coating layer may include a photoresist layer. The method also includes performing one or more immersion processes on the substrate after exposure. As an example, the one or more immersion processes include an immersion post-exposure bake process.
    Type: Application
    Filed: February 22, 2007
    Publication date: February 28, 2008
    Applicant: SOKUDO CO., LTD.
    Inventors: Mohsen Salek, Tetsuya Ishikawa, Christoper Beaudry, Steven Verhaverbeke, Helen Armer, Harald Herchen, Leon Volfovsky