Abstract: A device for deflecting light beams is provided, which includes a swing-mounted light exit segment of an optical waveguide and a swing-mounted mirror. The device features a first rotation device that is set up to rotate the light exit segment of the optical waveguide, from which light is able to strike the mirror, in a rotational plane, and a second rotation device that is set up to rotate the mirror around a rotational axis situated in the mirror plane, which deviates from the vertical to the rotational plane.

Abstract: A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.

Abstract: A method for manufacturing a micromechanical component is described, including the steps of: forming a first etch stop layer on a base substrate, the first etch stop layer being formed in such a way that it has a first pattern of through-cutouts; forming a first electrode-material layer on the first etch stop layer; forming a second etch stop layer on the first electrode-material layer, the second etch stop layer being formed in such a way that it has a second pattern of through-cutouts differing from the first pattern; forming a second electrode-material layer on the second etch stop layer; forming a patterned mask on the second electrode-material layer; and carrying out a first etching step in a first direction and a second etching step in a second direction counter to the first direction in order to etch at least one first electrode unit out of the first electrode-material layer and to etch at least one second electrode unit out of the second electrode-material layer.

Abstract: A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.

Abstract: A method for operating an electrostatic drive having a stator electrode and an actuator electrode which are designed as multilayer electrodes having subunits includes: predeflecting the actuator electrode with respect to the stator electrode from its non-energized starting position into a first end position by applying a first potential to the first stator electrode subunit, and applying a second potential which is different from the first potential to the first actuator electrode subunit, and applying a third potential which is different from the first potential and the second potential, to the second stator electrode subunit and to the second actuator electrode subunit.

Abstract: An electrostatic drive is described having an inner frame, at least one intermediate frame, which encloses the inner frame, and an outer frame, which encloses the inner frame and the at least one intermediate frame, each two adjacent frames of the inner, intermediate, and outer frames being connected to one another via at least one spring element, the spring elements, via which each two adjacent frames of the inner, intermediate, and outer frames are connected to one another, being situated in such a way that the longitudinal directions of the spring elements lie on a common longitudinal spring axis, and electrode fingers being situated on frame bars, which are oriented parallel to the longitudinal spring axis, of the inner frame, the at least one intermediate frame, and the outer frame. A manufacturing method for an electrostatic drive, a micromechanical component, and a manufacturing method for a micromechanical component, are also described.

Abstract: A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.

Abstract: A magnetic yoke (10) having a magnet (12) having a magnetization direction (14) on which a first yoke arm (18a) and a second yoke arm (18b) are mounted in such a way that the magnet (12) and the two yoke arms (18a, 18b) define a yoke intermediate space (20) extending from a front side to a rear side of the magnetic yoke; and first pole shoe (22a) configured on the first yoke arm (18a) and a second pole shoe (22b) configured on the second yoke arm (18b), between which a yoke gap (24) is located; the first pole shoe (22a) having a first width (b1) at a first end (40a) on the front side of the magnetic yoke (10), in parallel to the magnetization direction (14) of the magnet (12), and having a second width (b2) unequal to the first width (b1) at a second end (42a) facing opposite the first end (40a) on the rear side of the magnetic yoke (10), in parallel to the magnetization direction (14) of the magnet (12).

Abstract: In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.

Abstract: A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.

Abstract: A device for deflecting light beams is provided, which includes a swing-mounted light exit segment of an optical waveguide and a swing-mounted mirror. The device features a first rotation device that is set up to rotate the light exit segment of the optical waveguide, from which light is able to strike the mirror, in a rotational plane, and a second rotation device that is set up to rotate the mirror around a rotational axis situated in the mirror plane, which deviates from the vertical to the rotational plane.

Abstract: A production method for a micromechanical component and a micromechanical component apparatus are provided encompassing the steps of: forming a housing having an incident light window, forming a multitude of optically active surfaces on a wafer, subdividing the wafer into a multitude of chips having at least one optically active surface in each case, which surface is designed in such a way that, at least in a deactivated operating mode of the chip, the optically active surface is situated in an initial position with respect to the chip, and affixing at least one of the chips inside the housing, the optically active surface of the chip in its initial position being aligned at an angle of inclination that is not equal to 0° and not equal to 180° with respect to the incident light window.