Patents by Inventor Christoph Hermes
Christoph Hermes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11976996Abstract: A micromechanical component for a capacitive pressure sensor device, including a diaphragm that is stretched with the aid of a frame structure in such a way that a cantilevered area of the diaphragm spans a framed partial surface, and including a reinforcement structure that is formed at the cantilevered area. A first spatial direction oriented in parallel to the framed partial surface is definable in which the cantilevered area has a minimal extension, and a second spatial direction oriented in parallel to the framed partial surface and oriented perpendicularly with respect to the first spatial direction is definable in which the cantilevered area has a greater extension. The reinforcement structure is present at a first distance from the frame structure in the first spatial direction, and at a second distance in the second spatial direction, the second distance being greater than the first distance.Type: GrantFiled: December 18, 2019Date of Patent: May 7, 2024Assignee: ROBERT BOSCH GMBHInventors: Thomas Friedrich, Christoph Hermes, Hans Artmann, Heribert Weber, Peter Schmollngruber, Volkmar Senz
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Patent number: 11940345Abstract: A micromechanical component for a capacitive pressure sensor device includes a substrate; a frame structure that frames a partial surface; a membrane that is tensioned by the frame structure such that a self-supporting region of the membrane extends over the framed partial surface and an internal volume with a reference pressure therein is sealed in an airtight fashion, the self-supporting region of the membrane being deformable by a physical pressure on an external side of the self-supporting region that not equal to the reference pressure; a measurement electrode situated on the framed partial surface; and a reference measurement electrode that is situated on the framed partial surface and is electrically insulated from the measurement electrode.Type: GrantFiled: December 19, 2019Date of Patent: March 26, 2024Assignee: ROBERT BOSCH GMBHInventors: Thomas Friedrich, Christoph Hermes, Hans Artmann, Heribert Weber, Peter Schmollngruber, Volkmar Senz
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Publication number: 20240094329Abstract: Described herein is an illumination source adapted to generate a regular pattern integrated into a portable device, the illumination source including an array of light emitting diodes or laser light sources and a diffractive optical element. Also described herein is a detector including the illumination source, an array of optical sensors, where each optical sensor is configured to generate a sensor signal in response to an illumination of its respective light-sensitive area, and an evaluation device adapted to evaluate the sensor signal.Type: ApplicationFiled: September 28, 2023Publication date: March 21, 2024Inventors: Christian SCHILDKNECHT, Christoph LUNGENSCHMIED, Ingmar BRUDER, Michael EBERSPACH, Peter FEJES, Robert SEND, Sebastian VALOUCH, Thomas OHMER, Wilfried HERMES, Stefan HENGEN, Christian LENNARTZ
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Patent number: 11933689Abstract: A sensor device having a first counter electrode extending under an intermediate carrier, and having a first distance between the intermediate carrier and the first counter electrode being modifiable by the pressure on the movable region, and the first counter electrode encompassing, under the intermediate carrier, at least one electrically separated region that is disposed below a spacing element and includes at least a lateral extent of the spacing element.Type: GrantFiled: March 26, 2020Date of Patent: March 19, 2024Assignee: ROBERT BOSCH GMBHInventors: Heribert Weber, Christoph Hermes, Hans Artmann, Peter Schmollngruber, Thomas Friedrich, Volkmar Senz
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Publication number: 20240085518Abstract: Described herein is a mobile device with an optical detector including: at least one illumination source adapted to generate at least one illumination pattern for illuminating an object, where the illumination pattern includes a regular and/or constant and/or periodic pattern; at least one sensor element having a matrix of optical sensors, the optical sensors each having a light-sensitive area, where each optical sensor is configured to generate at least one sensor signal in response to an illumination of the light-sensitive area by at least one light beam propagating from the object to the detector; and at least one evaluation device adapted to determine at least one region of interest.Type: ApplicationFiled: September 28, 2023Publication date: March 14, 2024Inventors: Michael EBERSPACH, Thomas OHMER, Robert SEND, Christian LENNARTZ, Christopher HAHNE, Stefan HENGEN, Sebastian VALOUCH, Christoph LUNGENSCHMIED, Ingmar BRUDER, Wilfried HERMES, Celal Mohan OEGUEN, Christian Daniel SCHILDKNECHT, Peter SCHILLEN, Patrick SCHINDLER, Peter FEJES
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Patent number: 11912563Abstract: A micromechanical component, whose diaphragm is supported and has support structures on its inner diaphragm side. Each of the support structures includes a first and second edge element structure, and at least one intermediate element structure positioned between the first and second edge element structures. For each of the support structures, a plane of symmetry is definable, with respect to which at least the first edge element structure of the respective support structure and the second edge element structure of the respective support structure are specularly symmetric. In each of support structures, a first maximum dimension of its first edge element structure perpendicular to its plane of symmetry and a second maximum dimension of its second edge element structure perpendicular to its plane of symmetry are greater than the maximum dimension of its intermediate element structure perpendicular to its plane of symmetry.Type: GrantFiled: December 13, 2019Date of Patent: February 27, 2024Assignee: ROBERT BOSCH GMBHInventors: Hans Artmann, Christoph Hermes, Heribert Weber, Jochen Reinmuth, Peter Schmollngruber, Thomas Friedrich
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Patent number: 11912565Abstract: A micromechanical sensor unit, including: a substrate and an edge layer, which is situated on the substrate and laterally frames an inner area above the substrate; at least one diaphragm, which spans the inner area and forms a covered cavity above the substrate; at least one support point, which is situated between the substrate and the diaphragm inside the cavity and attaches the diaphragm to the edge layer and/or to the at least one support point. The support point separates the diaphragm into at least one measuring area that is movable through force action and at least one reference area that is not movable through force action. The substrate and the diaphragm, inside the cavity, include electrodes, which face one another in the measuring area and the reference area.Type: GrantFiled: December 17, 2019Date of Patent: February 27, 2024Assignee: ROBERT BOSCH GMBHInventors: Christoph Hermes, Kerrin Doessel, Thomas Friedrich
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Patent number: 11851324Abstract: A method for sealing entries in a MEMS element. The method includes: providing a functional layer having a functional region; producing a cavity underneath the functional region of the functional layer with the aid of a first entry outside of the functional region of the functional layer; sealing the first entry; producing a second entry to the cavity outside of the functional region of the functional layer; melting sealing material in the region of the second entry; and cooling off the melted sealing material to seal the second entry.Type: GrantFiled: December 13, 2019Date of Patent: December 26, 2023Assignee: ROBERT BOSCH GMBHInventors: Christoph Hermes, Hans Artmann, Heribert Weber, Peter Schmollngruber, Thomas Friedrich, Tobias Joachim Menold, Mawuli Ametowobla
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Patent number: 11840445Abstract: A MEMS sensor including a diaphragm, a base surface area of the diaphragm being delimited with the aid of a peripheral wall structure, and the base surface area including at least two subareas, of which at least one of the subareas is deflectably situated, and the at least two subareas being separated from one another with the aid of at least one separating structure or being delimited by the latter. The separating structure includes at least one fluid through-opening for the passage of fluid.Type: GrantFiled: December 17, 2019Date of Patent: December 12, 2023Assignee: ROBERT BOSCH GMBHInventors: Christoph Hermes, Kerrin Doessel, Thomas Friedrich
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Publication number: 20230339745Abstract: A method for manufacturing a micromechanical sensor. The method includes: applying a first oxide sacrificial layer onto a substrate; removing material of the substrate through openings in the first oxide sacrificial layer; closing the openings in the first oxide sacrificial layer by applying a second oxide sacrificial layer; forming a sensing area on a carrier structure, the sensing area and the carrier structure being formed on the oxide sacrificial layers and the sensing area and/or the carrier structure being connected to the substrate via at least one attachment area, which forms a flexible structure; and at least partially removing the oxide sacrificial layers between the carrier structure and the substrate with the aid of an etching process.Type: ApplicationFiled: March 22, 2021Publication date: October 26, 2023Inventors: Heribert Weber, Andreas Scheurle, Christoph Hermes, Peter Schmollngruber, Thomas Friedrich
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Patent number: 11554952Abstract: A method for closing openings in a flexible diaphragm of a MEMS element. The method includes: providing at least one opening in the flexible diaphragm, situating sealing material in the area of the at least one opening, melting-on at least the applied sealing material in the area of the at least one opening, and subsequently cooling the melted-on material to close the at least one opening.Type: GrantFiled: December 20, 2018Date of Patent: January 17, 2023Assignee: Robert Bosch GmbHInventors: Bernhard Gehl, Christoph Hermes, Juergen Butz
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Publication number: 20220396477Abstract: A micromechanical component for a sensor device or microphone device. The micromechanical component includes a diaphragm with a diaphragm inner side to which an electrode structure is directly or indirectly connected; and a cavity that is formed at least in a volume that is exposed by at least one removed area of at least one sacrificial layer. At least one residual area made of at least one electrically insulating sacrificial layer material of the at least one sacrificial layer is also present at the micromechanical component, and including at least one insulation area made of at least one electrically insulating material that is not the same as the electrically insulating sacrificial layer material. The electrode structure is electrically insulated from the diaphragm, and/or the at least one residual area of the at least one sacrificial layer is delimited from the cavity, using the at least one insulation area.Type: ApplicationFiled: January 12, 2021Publication date: December 15, 2022Inventors: Heribert Weber, Andreas Scheurle, Christoph Hermes, Peter Schmollngruber, Thomas Friedrich
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Patent number: 11418885Abstract: A micromechanical component for a sensor device or microphone device. The component includes a diaphragm support structure with a diaphragm, a cavity formed in the diaphragm support structure and adjoined by a diaphragm inner side, and a separating trench structured through the surface of the diaphragm support structure and extends to the cavity and completely frames the diaphragm, and that is sealed off media-tight and/or air-tight using at least one separating trench closure material. An etching channel is formed in the diaphragm support structure, separately from the separating trench, and extends from its first etching channel end section to its second etching channel end section. The first etching channel end section opens into the cavity, and the second etching channel end section is sealed off media-tight and/or air-tight using at least one etching channel closure structure formed on an outer partial surface of the surface of the diaphragm support structure.Type: GrantFiled: January 12, 2021Date of Patent: August 16, 2022Assignee: Robert Bosch GmbHInventors: Heribert Weber, Andreas Scheurle, Christoph Hermes, Peter Schmollngruber, Thomas Friedrich
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Publication number: 20220090975Abstract: A sensor device. The sensor device includes: a substrate; an electrical insulation layer on the substrate; an edge structure disposed on the electrical insulation layer and that delimits an internal region above the substrate; a membrane anchored on the edge structure and at least partly spanning the internal region, the membrane encompassing in the internal region a region movable by a pressure; a first intermediate carrier that extends in the movable region below the membrane and is electrically and mechanically connected to the membrane by contact points, and encompasses at least one spacing element that extends from the intermediate carrier toward the substrate; and a first counter electrode on the electrical insulation layer, the first counter electrode extending under the intermediate carrier, and a first distance between the intermediate carrier and the first counter electrode being modifiable by the pressure on the movable region.Type: ApplicationFiled: March 26, 2020Publication date: March 24, 2022Inventors: Heribert Weber, Christoph Hermes, Hans Artmann, Peter Schmollngruber, Thomas Friedrich, Volkmar Senz
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Publication number: 20220041428Abstract: A MEMS sensor including a diaphragm, a base surface area of the diaphragm being delimited with the aid of a peripheral wall structure, and the base surface area including at least two subareas, of which at least one of the subareas is deflectably situated, and the at least two subareas being separated from one another with the aid of at least one separating structure or being delimited by the latter. The separating structure includes at least one fluid through-opening for the passage of fluid.Type: ApplicationFiled: December 17, 2019Publication date: February 10, 2022Inventors: Christoph Hermes, Kerrin Doessel, Thomas Friedrich
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Publication number: 20220003621Abstract: A micromechanical component for a capacitive pressure sensor device, including a diaphragm that is stretched with the aid of a frame structure in such a way that a cantilevered area of the diaphragm spans a framed partial surface, and including a reinforcement structure that is formed at the cantilevered area. A first spatial direction oriented in parallel to the framed partial surface is definable in which the cantilevered area has a minimal extension, and a second spatial direction oriented in parallel to the framed partial surface and oriented perpendicularly with respect to the first spatial direction is definable in which the cantilevered area has a greater extension. The reinforcement structure is present at a first distance from the frame structure in the first spatial direction, and at a second distance in the second spatial direction, the second distance being greater than the first distance.Type: ApplicationFiled: December 18, 2019Publication date: January 6, 2022Inventors: Thomas Friedrich, Christoph Hermes, Hans Artmann, Heribert Weber, Peter Schmollngruber, Volkmar Senz
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Publication number: 20220002147Abstract: A method for sealing entries in a MEMS element. The method includes: providing a functional layer having a functional region; producing a cavity underneath the functional region of the functional layer with the aid of a first entry outside of the functional region of the functional layer; sealing the first entry; producing a second entry to the cavity outside of the functional region of the functional layer; melting sealing material in the region of the second entry; and cooling off the melted sealing material to seal the second entry.Type: ApplicationFiled: December 13, 2019Publication date: January 6, 2022Applicant: Robert Bosch GmbHInventors: Christoph Hermes, Hans Artmann, Heribert Weber, Peter Schmollngruber, Thomas Friedrich, Tobias Joachim Menold, Mawuli Ametowobla
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Publication number: 20210395074Abstract: A micromechanical component, whose diaphragm is supported and has support structures on its inner diaphragm side. Each of the support structures includes a first and second edge element structure, and at least one intermediate element structure positioned between the first and second edge element structures. For each of the support structures, a plane of symmetry is definable, with respect to which at least the first edge element structure of the respective support structure and the second edge element structure of the respective support structure are specularly symmetric. In each of support structures, a first maximum dimension of its first edge element structure perpendicular to its plane of symmetry and a second maximum dimension of its second edge element structure perpendicular to its plane of symmetry are greater than the maximum dimension of its intermediate element structure perpendicular to its plane of symmetry.Type: ApplicationFiled: December 13, 2019Publication date: December 23, 2021Inventors: Hans Artmann, Christoph Hermes, Heribert Weber, Jochen Reinmuth, Peter Schmollngruber, Thomas Friedrich
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Publication number: 20210354981Abstract: A micromechanical sensor unit, including: a substrate and an edge layer, which is situated on the substrate and laterally frames an inner area above the substrate; at least one diaphragm, which spans the inner area and forms a covered cavity above the substrate; at least one support point, which is situated between the substrate and the diaphragm inside the cavity and attaches the diaphragm to the edge layer and/or to the at least one support point. The support point separates the diaphragm into at least one measuring area that is movable through force action and at least one reference area that is not movable through force action. The substrate and the diaphragm, inside the cavity, include electrodes, which face one another in the measuring area and the reference area.Type: ApplicationFiled: December 17, 2019Publication date: November 18, 2021Inventors: Christoph Hermes, Kerrin Doessel, Thomas Friedrich
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Publication number: 20210229983Abstract: A method for closing openings in a flexible diaphragm of a MEMS element. The method includes: providing at least one opening in the flexible diaphragm, situating sealing material in the area of the at least one opening, melting-on at least the applied sealing material in the area of the at least one opening, and subsequently cooling the melted-on material to close the at least one opening.Type: ApplicationFiled: December 20, 2018Publication date: July 29, 2021Inventors: Bernhard Gehl, Christoph Hermes, Juergen BUTZ