Abstract: In an optical position-measuring device for acquiring the rotational angle between two objects that are rotationally moveable relative to each other, a grating measuring standard rotating about an axis of rotation is arranged as a reflection grating. Position information both about an azimuthal rotary movement about the axis of rotation and about a radial displacement of the grating measuring standard is able to be obtained. At least one detection unit is used for scanning the rotating grating measuring standard in order to determine the azimuthal rotational angle as well as a radial displacement of the grating measuring standard. The neutral pivot points of the scanning of the grating measuring standard for the determination of the rotational angle and the displacement are situated in the same plane, with this plane being situated in parallel with the grating measuring standard.

Abstract: In an optical position-measuring device for acquiring the rotational angle between two objects that are rotationally moveable relative to each other, a grating measuring standard rotating about an axis of rotation is arranged as a reflection grating. Position information both about an azimuthal rotary movement about the axis of rotation and about a radial displacement of the grating measuring standard is able to be obtained. At least one detection unit is used for scanning the rotating grating measuring standard in order to determine the azimuthal rotational angle as well as a radial displacement of the grating measuring standard. The neutral pivot points of the scanning of the grating measuring standard for the determination of the rotational angle and the displacement are situated in the same plane, with this plane being situated in parallel with the grating measuring standard.

Abstract: In a position-measuring device for determining the position of a first object with respect to a second object that is displaceable relative to the first object, a measuring standard is connected to the first object and includes at least one periodic scale grating, which is arranged as a transmission grating and has a first periodicity. A scanning unit is connected to the second object and includes at least one light source, at least one periodic scanning grating, which has a second periodicity, and a detector system, which includes detector regions that are sensitive to radiation and are periodically disposed at a third periodicity in a detection plane. The bundles of rays emitted by the light source first impinge upon the scale grating and then pass through the scanning grating.

Abstract: An optical position-measuring device for determining the position of a first object relative to a second object movable relative to the first object along a measurement direction includes a scale with a measuring graduation connected to the first object and extending along the measurement direction. A scanner is connected to the second object and includes a fiber-optic array including optical fibers. The fiber-optic array is configured as a fiber-optic plate having an image-input face facing the scale and an image-output face facing the detector array. The fiber-optic array transmits a light pattern into a detection plane of the detector array. An interstitial medium is disposed between the image-output face of the fiber-optic plate and the detector array to ensure that an amount of deflection that the beams exiting the image-output face undergo on a path to the detector array is smaller than in a case without the interstitial medium.

Abstract: In a position-measuring device for determining the position of a first object with respect to a second object that is displaceable relative to the first object, a measuring standard is connected to the first object and includes at least one periodic scale grating, which is arranged as a transmission grating and has a first periodicity. A scanning unit is connected to the second object and includes at least one light source, at least one periodic scanning grating, which has a second periodicity, and a detector system, which includes detector regions that are sensitive to radiation and are periodically disposed at a third periodicity in a detection plane. The bundles of rays emitted by the light source first impinge upon the scale grating and then pass through the scanning grating.

Abstract: An optical position-measuring device for absolute position determination includes a material measure extending along a measurement direction and including an incremental graduation and an absolute code. A scanning unit movable relative to the material measure has a light source, a scanning grating for optically scanning the incremental graduation and a detector device. The detector device includes an incremental detector for generating incremental signals from the optical scanning of the incremental graduation and an absolute detector for generating absolute signals from optical scanning of the absolute code. A common detection plane is located at a defined perpendicular distance from the scanning grating and/or a periodicity of a fringe pattern on the incremental detector is selected such that, in the event of scattering contamination in a region of the material measure and/or the scanning grating, amplitudes of the incremental signals and the absolute signals drop off equally.

Abstract: An optical position-measuring device for determining the position of a first object relative to a second object movable relative to the first object along a measurement direction includes a scale with a measuring graduation connected to the first object and extending along the measurement direction. A scanner is connected to the second object and includes a fiber-optic array including optical fibers. The fiber-optic array is configured as a fiber-optic plate having an image-input face facing the scale and an image-output face facing the detector array. The fiber-optic array transmits a light pattern into a detection plane of the detector array. An interstitial medium is disposed between the image-output face of the fiber-optic plate and the detector array to ensure that an amount of deflection that the beams exiting the image-output face undergo on a path to the detector array is smaller than in a case without the interstitial medium.

Abstract: An optical position-measuring device for absolute position determination includes a material measure extending along a measurement direction and including an incremental graduation and an absolute code. A scanning unit movable relative to the material measure has a light source, a scanning grating for optically scanning the incremental graduation and a detector device. The detector device includes an incremental detector for generating incremental signals from the optical scanning of the incremental graduation and an absolute detector for generating absolute signals from optical scanning of the absolute code. A common detection plane is located at a defined perpendicular distance from the scanning grating and/or a periodicity of a fringe pattern on the incremental detector is selected such that, in the event of scattering contamination in a region of the material measure and/or the scanning grating, amplitudes of the incremental signals and the absolute signals drop off equally.

Abstract: An angle-measuring device having a scanning device with which scanning of a closed serial first code and scanning of a closed serial second code is enabled, wherein a length of the closed serial second code is less than a length of the closed serial first code, and the closed serial first code and the closed serial second code have at least one common code section. The angle-measuring device includes a detector array for generating first and second sequences of code words of a predetermined scanning length upon scanning of the closed serial first code and second codes, respectively. The first sequence includes a first partial sequence and one common partial sequence, and wherein the common partial sequence is created upon scanning of the common code section. The second sequence includes a second partial sequence and the common partial sequence.

Abstract: An angle-measuring device having a scanning device with which scanning of a closed serial first code and scanning of a closed serial second code is enabled, wherein a length of the closed serial second code is less than a length of the closed serial first code, and the closed serial first code and the closed serial second code have at least one common code section. The angle-measuring device includes a detector array for generating first and second sequences of code words of a predetermined scanning length upon scanning of the closed serial first code and second codes, respectively. The first sequence includes a first partial sequence and one common partial sequence, and wherein the common partial sequence is created upon scanning of the common code section. The second sequence includes a second partial sequence and the common partial sequence.

Abstract: An absolute angle coding that includes a first cyclically continued code sequence that cyclically continues a first code sequence a multiple number of times, wherein the first code sequence is disposed within 360° and includes a first succession of code elements that defines a first angle sector. The code further includes a second cyclically continued code sequence that cyclically continues a second code sequence a multiple number of times, wherein the second code sequence is disposed within 360° and includes a second succession of code elements that defines a second angle sector, wherein the first cyclically continued sequence and the second cyclically continued code sequence in combination unambiguously absolutely encode the 360°. The first angle sector is not equal to the second angle sector, and at least one of the second code sequences of the second cyclically continued code sequence is embodied only partially within said 360° and with a succeeding second code sequence forms a joint.

Abstract: An absolute angle coding that includes a first code sequence disposed within 360°, wherein the first code sequence has a first length and is disposed NA times in succession. The absolute angle coding includes a second code sequence disposed within 360°, wherein the second code sequence has a second length and is disposed NB times in succession, wherein the first code sequence and the second code sequence in combination absolutely unambiguously encode said 360°. In addition, NA is greater than or equal to 2 and NB is greater than or equal to 2 and NA is not equal to NB. The first length is not equal to the second length and the first code sequence and the second code sequence are disposed in one common track, in that a part of the first code sequence and a part of the second code sequence are disposed in alternation.

Abstract: A process for fabricating a semiconductor device with copper interconnects is disclosed. In the process of the present invention, a layer of dielectric material is formed on a substrate. At least one recess is formed in the layer of dielectric material. Barrier layers and seed layers for electroplating are then deposited over the entire surface of the substrate. The recess is then filled with copper by electroplating copper over the surface of the substrate. The electroplated copper has an average grain size of about 0.1 &mgr;m to about 0.2 &mgr;m immediately after deposition. The substrate is then annealed to increase the grain size of the copper and to provide a grain structure that is stable over time at ambient conditions and during subsequent processing. After annealing, the average grain size of the copper is at least about 1 &mgr;m in at least one dimension. The copper that is electroplated on the dielectric layer is then removed using an expedient such as chemical mechanical polishing.