Patents by Inventor Christoph Zazcek

Christoph Zazcek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for decontaminating optical surfaces
    Patent number: 6796664
    Abstract: A method and a device for decontaminating optical surfaces, in particular for decontaminating the surfaces of beam-guiding optics employing UV-radiation in a cleansing atmosphere. The wavelength of the UV-radiation employed falls within a range where oxygen strongly absorbs and the cleansing atmosphere has an oxygen concentration less than that of air. The method and device have application to, e.g., cleaning the surfaces of the beam-guiding optics of microlithographic projection-exposure systems.
    Type: Grant
    Filed: March 12, 2003
    Date of Patent: September 28, 2004
    Assignee: Carl Zeiss SMT AG
    Inventors: Jens Luedecke, Christoph Zazcek, Alexandra Pazidis, Jens Ullmann, Annette Muehlpfordt, Michael Thier, Stefan Wiesner
  • Method and device for decontaminating optical surfaces
    Publication number: 20030210458
    Abstract: A method and a device for decontaminating optical surfaces, in particular for decontaminating the surfaces of beam-guiding optics employing UV-radiation in a cleansing atmosphere. The wavelength of the UV-radiation employed falls within a range where oxygen strongly absorbs and the cleansing atmosphere has an oxygen concentration less than that of air. The method and device have application to, e.g., cleaning the surfaces of the beam-guiding optics of microlithographic projection-exposure systems.
    Type: Application
    Filed: March 12, 2003
    Publication date: November 13, 2003
    Applicant: CARL ZEISS SMT AG
    Inventors: Jens Luedecke, Christoph Zazcek, Alexandra Pazidis, Jens Ullmann, Annette Muehlpfordt, Michael Thier, Stefan Wiesner