Abstract: A mass flow control apparatus is capable of controlling a flow rate of a fluid to a tool. Pressure of the fluid is regulated by a solenoid valve, which receives signals from a control module. Various set points may be inputted to the control module, whereby control module receives pressure sensor signals from across a flow restrictor and adjusts the solenoid valve to control the fluid flow rate to equal a set point.

Abstract: A self-correcting pressure-based mass flow control apparatus includes outlet pressure sensing to enable correction for non-ideal operating conditions. Further the mass flow control apparatus having a fluid pathway, a shutoff valve in the fluid pathway, a reference volume in the fluid pathway, a first pressure measuring sensor in fluid communication with the reference volume, a first temperature measuring sensor providing a temperature signal indicative of the fluid temperature within the reference volume, a proportional valve in the fluid pathway, and a second pressure measuring sensor in fluid communication with the fluid pathway.

Abstract: A mass flow control apparatus comprising a proportional valve upstream of a flow measurement portion, a pressure sensing element fluidly connected to determine a fluid pressure downstream of the flow measurement portion, and a dynamically adjustable variable valve downstream of the flow measurement portion and adjacent to the pressure sensing element connection. Fluid conductance of the variable valve is adjusted according to a control scheme based upon limitations of the flow measurement portion. Integral flow verification may be enabled with additional fluid pathway elements upstream of the flow measurement portion.

Abstract: A mass flow control apparatus comprising a proportional valve upstream of a flow measurement portion, a pressure sensing element fluidly connected to determine a fluid pressure downstream of the flow measurement portion, and a dynamically adjustable variable valve downstream of the flow measurement portion and adjacent to the pressure sensing element connection. Fluid conductance of the variable valve is adjusted according to a control scheme based upon limitations of the flow measurement portion. Integral flow verification may be enabled with additional fluid pathway elements upstream of the flow measurement portion.

Abstract: A mass flow control apparatus comprising a proportional valve upstream of a flow measurement portion, a pressure sensing element fluidly connected to determine a fluid pressure downstream of the flow measurement portion, and a dynamically adjustable variable valve downstream of the flow measurement portion and adjacent to the pressure sensing element connection. Fluid conductance of the variable valve is adjusted according to a control scheme based upon limitations of the flow measurement portion. Integral flow verification may be enabled with additional fluid pathway elements upstream of the flow measurement portion.

Abstract: A mass flow control apparatus comprising a proportional valve upstream of a flow measurement portion, a pressure sensing element fluidly connected to determine a fluid pressure downstream of the flow measurement portion, and a dynamically adjustable variable valve downstream of the flow measurement portion and adjacent to the pressure sensing element connection. Fluid conductance of the variable valve is adjusted according to a control scheme based upon limitations of the flow measurement portion. Integral flow verification may be enabled with additional fluid pathway elements upstream of the flow measurement portion.

Abstract: A mass flow control apparatus comprising a proportional valve upstream of a flow measurement portion, a pressure sensing element fluidly connected to determine a fluid pressure downstream of the flow measurement portion, and a dynamically adjustable variable valve downstream of the flow measurement portion and adjacent to the pressure sensing element connection. Fluid conductance of the variable valve is adjusted according to a control scheme based upon limitations of the flow measurement portion. Integral flow verification may be enabled with additional fluid pathway elements upstream of the flow measurement portion.

Abstract: Mass flow control methods and systems are described enabling rate of decay measurements with an orifice (or flow restrictor) located between the control volume and the outlet valve such that the outlet valve acts as the valve restricting backpressure. The system may include a main flow path and a reduced flow path that split the gas flow based on the received set point and backpressure. Measuring valve coil temperature may be used by measuring voltage and current of the valve of known resistance at room temperature and using copper coefficient of thermal resistivity delta. This temperature data may improve adjacent transducer temperature data and adjust the transducer output. Flow calculation during a long ROD pressure drop (in reduced flow rate) by making smaller flow calculation during sub section of the same, adjusting the control loop of delivered flow in real time while the ROD is still going and repeating.

Abstract: A self-correcting pressure-based mass flow control apparatus includes outlet pressure sensing to enable correction for non-ideal operating conditions. Further the mass flow control apparatus having a fluid pathway, a shutoff valve in the fluid pathway, a reference volume in the fluid pathway, a first pressure measuring sensor in fluid communication with the reference volume, a first temperature measuring sensor providing a temperature signal indicative of the fluid temperature within the reference volume, a proportional valve in the fluid pathway, and a second pressure measuring sensor in fluid communication with the fluid pathway.

Abstract: The disclosed embodiments include several embodiments of a mass flow controller and methods for configuring a mass flow controller. For example, in one embodiment, the method includes automatically displaying a current configuration parameter, such as, but not limited to, a MacID and/or baud rate, in response to receiving power, from an external device, at a communication interface, such as, but not limited to, a near-field communication interface and/or a universal serial bus communication interface of the mass flow controller. The method adjusts the configuration parameter based on user input and stores the configuration parameter in memory while being powered by the external device.

Abstract: A mass flow control apparatus comprising a proportional valve upstream of a flow measurement portion, a pressure sensing element fluidly connected to determine a fluid pressure downstream of the flow measurement portion, and a dynamically adjustable variable valve downstream of the flow measurement portion and adjacent to the pressure sensing element connection. Fluid conductance of the variable valve is adjusted according to a control scheme based upon limitations of the flow measurement portion. Integral flow verification may be enabled with additional fluid pathway elements upstream of the flow measurement portion.

Abstract: A mass flow control apparatus comprising a proportional valve upstream of a flow measurement portion, a pressure sensing element fluidly connected to determine a fluid pressure downstream of the flow measurement portion, and a dynamically adjustable variable valve downstream of the flow measurement portion and adjacent to the pressure sensing element connection. Fluid conductance of the variable valve is adjusted according to a control scheme based upon limitations of the flow measurement portion. Integral flow verification may be enabled with additional fluid pathway elements upstream of the flow measurement portion.

Abstract: The disclosed embodiments include several embodiments of a mass flow controller and methods for configuring a mass flow controller. For example, in one embodiment, the method includes automatically displaying a current configuration parameter, such as, but not limited to, a MacID and/or baud rate, in response to receiving power, from an external device, at a communication interface, such as, but not limited to, a near-field communication interface and/or a universal serial bus communication interface of the mass flow controller. The method adjusts the configuration parameter based on user input and stores the configuration parameter in memory while being powered by the external device.

Abstract: The disclosed embodiments include a method for improving a mass flow controller.

Abstract: A mass flow controller includes a fluid inlet, a fluid outlet, and a conduit defining a flow path along which the fluid flows through the mass flow controller. The mass flow controller includes an inlet block having an inlet aperture, an inlet channel fluidly coupled to the conduit, and one or more restrictors positioned along the flow path between the inlet aperture and inlet channel to minimize flow perturbations when a rate of decay measurement is taken or when flow the amount of pressure supplied to the valve inlet is otherwise interrupted.

Abstract: Systems and methods for liquid flow sensing and control for use with a variety of different types of liquid flow measurement and control systems. The liquid flow sensor system senses a flow signal indicative of the flow rate of the liquid flowing in a sensor conduit and analyzes the flow signal to determine, by detecting characteristic changes in the signal, whether a bubble is present in the sensor conduit. Where the system determines that a bubble is present, it may generate an alarm signal indicative of the presence of the bubble. A flow control system incorporating the flow sensor as a feedback source may respond to the detection of a bubble by temporarily freezing the flow control parameters until the bubble has exited the sensor conduit. The flow control system can implement procedures for clearing a bubble from the sensor conduit where the system detects that the bubble has become stuck.

Abstract: Systems and methods for liquid flow sensing and control for use with a variety of different types of liquid flow measurement and control systems. The liquid flow sensor system senses a flow signal indicative of the flow rate of the liquid flowing in a sensor conduit and analyzes the flow signal to determine, by detecting characteristic changes in the signal, whether a bubble is present in the sensor conduit. Where the system determines that a bubble is present, it may generate an alarm signal indicative of the presence of the bubble. A flow control system incorporating the flow sensor as a feedback source may respond to the detection of a bubble by temporarily freezing the flow control parameters until the bubble has exited the sensor conduit. The flow control system can implement procedures for clearing a bubble from the sensor conduit where the system detects that the bubble has become stuck.

Abstract: Systems and methods for liquid flow sensing and control for use with a variety of different types of liquid flow measurement and control systems. The liquid flow sensor system senses a flow signal indicative of the flow rate of the liquid flowing in a sensor conduit and analyzes the flow signal to determine, by detecting characteristic changes in the signal, whether a bubble is present in the sensor conduit. Where the system determines that a bubble is present, it may generate an alarm signal indicative of the presence of the bubble. A flow control system incorporating the flow sensor as a feedback source may respond to the detection of a bubble by temporarily freezing the flow control parameters until the bubble has exited the sensor conduit. The flow control system can implement procedures for clearing a bubble from the sensor conduit where the system detects that the bubble has become stuck.