Abstract: A device for measuring an acceleration includes a vibrating accelerometer including: a semiconductor substrate forming a fixed frame of the accelerometer; a test weight of the same material as the substrate and connected to the fixed frame, movable translationally along at least one sensing axis of the vibrating accelerometer; a guide of the same material as the substrate, connected to the fixed frame and test weight, guiding the test weight in the direction of the sensing axis; a layer made of a piezoelectric semiconductor deposited on the substrate, the layer being tensilely prestrained; a resonator in the layer connected to the fixed frame, the resonator subjected to tension or compression in the direction of the sensing axis; and at least one transducer connected to the resonator, able to actuate the resonator, to keep the resonator oscillating and/or to detect an electrical signal generated by the resonator.

Abstract: A device for measuring an acceleration includes a vibrating accelerometer including: a semiconductor substrate forming a fixed frame of the accelerometer; a test weight of the same material as the substrate and connected to the fixed frame, movable translationally along at least one sensing axis of the vibrating accelerometer; a guide of the same material as the substrate, connected to the fixed frame and test weight, guiding the test weight in the direction of the sensing axis; a layer made of a piezoelectric semiconductor deposited on the substrate, the layer being tensilely prestrained; a resonator in the layer connected to the fixed frame, the resonator subjected to tension or compression in the direction of the sensing axis; and at least one transducer connected to the resonator, able to actuate the resonator, to keep the resonator oscillating and/or to detect an electrical signal generated by the resonator.