Patents by Inventor Christopher Allen Bode

Christopher Allen Bode has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for determining optimal photolithography overlay targets based on process performance and yield in microelectronic fabrication
    Patent number: 7200459
    Abstract: A method is provided for manufacturing, the method including processing a workpiece in a processing step, measuring a parameter characteristic of the processing performed on the workpiece in the processing step, and forming an output signal corresponding to the characteristic parameter measured. The method also includes setting a target value for the processing performed in the processing step based on the output signal.
    Type: Grant
    Filed: January 4, 2000
    Date of Patent: April 3, 2007
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Christopher Allen Bode, Anthony J. Toprac
  • Method for relating photolithography overlay target damage and chemical mechanical planarization (CMP) fault detection to CMP tool indentification
    Patent number: 6741903
    Abstract: A method is provided, the method comprising processing a workpiece, having a photolithography overlay target structure disposed thereon, using a chemical-mechanical planarization (CMP) tool and measuring a photolithography overlay parameter using the photolithography overlay target structure. The method also comprises forming an output signal corresponding to the photolithography overlay parameter measured and to the chemical-mechanical planarization (CMP) tool used and using the output signal to improve at least one of accuracy in photolithography overlay metrology and fault detection in chemical-mechanical planarization (CMP).
    Type: Grant
    Filed: June 1, 2000
    Date of Patent: May 25, 2004
    Assignee: Adavanced Micro Devices, Inc.
    Inventors: Christopher Allen Bode, Anthony J. Toprac