Patents by Inventor Christopher Barnett

Christopher Barnett has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High flux, high energy photon source
    Publication number: 20070278429
    Abstract: A high energy photon source for generating EUV radiation comprises a nozzle emitting a supersonic stream of source material, a laser or electrical/magnetic pre-ionization mechanism and a laser or electrical/magnetic excitation mechanism and a skimmer plate between them providing a collimated high density beam of source material for excitation.
    Type: Application
    Filed: November 7, 2003
    Publication date: December 6, 2007
    Inventors: Alan Taylor, Christopher Barnett, David Klug, Ian Mercer
  • High flux, high energy photon source
    Publication number: 20060017023
    Abstract: A high energy photon source for generating EUV radiation comprises a nozzle emitting a supersonic stream of source material, a laser or electrical/magnetic pre-ionization mechanism and a laser or electrical/magnetic excitation mechanism and a skimmer plate between them providing a collimated high density beam of source material for excitation.
    Type: Application
    Filed: November 7, 2003
    Publication date: January 26, 2006
    Inventors: Alan Taylor, Christopher Barnett, David Klug, Ian Mercer