Abstract: A processing system may include a plasma chamber operable to generate a plasma, and an extraction assembly, arranged along a side of the plasma chamber. The extraction assembly may include an extraction plate including an extraction aperture, the extraction plate having a non-planar shape, and generating an extracted ion beam at a high angle of incidence with respect to a perpendicular to a plane of a substrate, when the plane of the substrate is arranged parallel to the side of the plasma chamber.

Abstract: A seal assembly is provided that includes a protective shroud to protect a sealing element from hazardous elements and/or a hazardous environment.

Abstract: Disclosed herein is an innovative self-sterilizing door handle. The innovation features various door handle shape embodiments where the grasping portion of the handle is made from light-guiding material capable of low attenuation of UVB and UVC light. UV light may be guided into the grasping portion by optical fibers extending from a source comprising an array of LEDs capable of emitting UVB or UVC light. The light source may be integrally formed as part of the door handle hardware. In addition, the surface of the grasping portion of the innovative self-sterilizing handle may be coated with nano-particulate metal oxides.

Abstract: The present invention is directed to a specially configured seal system which provides a barrier to gas leakage flow between a pressurized module and its external environment. The seal includes a shroud covering which protects the sealing interface from its environment when not in use, and retracts to expose the sealing interface when mated. The seal system is constructed and arranged to mate with a seal of identical construction and arrangement or to mate with a flat surface.