Patents by Inventor Christopher C. Thompson

Christopher C. Thompson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing composition for noble metals
    Patent number: 7161247
    Abstract: The invention provides a polishing composition and a method of chemically-mechanically polishing a substrate comprising a noble metal, the polishing composition comprising (a) an oxidizing agent that oxidizes a noble metal, (b) an anion selected from the group consisting of sulfate, borate, nitrate, and phosphate, and (c) a liquid carrier. The invention further provides a polishing composition and a method of chemically-mechanically polishing a substrate comprising ruthenium, the polishing composition comprising (a) an oxidizing agent that oxidizes ruthenium above the +4 oxidation state, (b) a polishing additive selected from the group consisting of metal sequestering polymers, metal chelators, organic thiols, compounds that reduce ruthenium tetraoxide, lactones, and ?-hydroxycarbonyl compounds.
    Type: Grant
    Filed: July 28, 2004
    Date of Patent: January 9, 2007
    Assignee: Cabot Microelectronics Corporation
    Inventors: Francesco De Rege Thesauro, Vlasta Brusic, Christopher C. Thompson, Benjamin P. Bayer