Patents by Inventor Christopher D. Bowker

Christopher D. Bowker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selective plasma etching during formation of integrated circuitry
    Patent number: 4687543
    Abstract: A method is disclosed for removing (etching) an insulating layer form an electrically semiconductive material wherein a volatile fluoride is substituted for a hydrocarbon in gases for selective plasma discharges. The removing is done without polymer build-up and loss of selectivity.
    Type: Grant
    Filed: February 21, 1986
    Date of Patent: August 18, 1987
    Assignee: Tegal Corporation
    Inventor: Christopher D. Bowker