Patents by Inventor Christopher D. Martinez

Christopher D. Martinez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for distribution of dopant gases or vapors in an arc chamber for use in an ionization source
    Patent number: 6627901
    Abstract: An apparatus and method for distributing dopant gas or vapor in an arc chamber of ion source used as part of an ion implanter. The apparatus includes a plenum, a sub-plenum, and a baffle to distribute the dopant gas or vapor through out the arc chamber. The method allows dopant gas and vapors to be distributed in such a way as to cause efficient reaction of dopant gas or vapor molecules with electrons created by a filament contained in the arc chamber. The reaction of dopant gas or vapor molecules with the electrons in turn produces positively charged ions by the ion implanter.
    Type: Grant
    Filed: January 4, 2001
    Date of Patent: September 30, 2003
    Assignee: NEC Electronics, Inc.
    Inventor: Christopher D. Martinez
  • Apparatus and method for distribution of dopant gases or vapors in an arc chamber for use in an ionization source
    Publication number: 20020084258
    Abstract: An apparatus and method for distributing dopant gas or vapor in an arc chamber of ion source used as part of an ion implanter. The apparatus includes a plenum, a sub-plenum, and a baffle to distribute the dopant gas or vapor through out the arc chamber. The method allows dopant gas and vapors to be distributed in such a way as to cause efficient reaction of dopant gas or vapor molecules with electrons created by a filament contained in the arc chamber. The reaction of dopant gas or vapor molecules with the electrons in turn produces positively charged ions by the ion implanter.
    Type: Application
    Filed: January 4, 2001
    Publication date: July 4, 2002
    Inventor: Christopher D. Martinez