Patents by Inventor Christopher Duncan Sheraw

Christopher Duncan Sheraw has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for controlling structure height
    Patent number: 8557649
    Abstract: Methods for controlling the height of semiconductor structures are disclosed. Amorphous carbon is used as a stopping layer for controlling height variability. In one embodiment, the height of replacement metal gates for transistors is controlled. In another embodiment, the step height of a shallow trench isolation region is controlled.
    Type: Grant
    Filed: October 21, 2011
    Date of Patent: October 15, 2013
    Assignee: International Business Machines Corporation
    Inventors: Rajasekhar Venigalla, Michael Vincent Aquilino, Massud A. Aminpur, Michael P. Belyansky, Unoh Kwon, Christopher Duncan Sheraw, Daewon Yang
  • METHOD FOR CONTROLLING STRUCTURE HEIGHT
    Publication number: 20130102125
    Abstract: Methods for controlling the height of semiconductor structures are disclosed. Amorphous carbon is used as a stopping layer for controlling height variability. In one embodiment, the height of replacement metal gates for transistors is controlled. In another embodiment, the step height of a shallow trench isolation region is controlled.
    Type: Application
    Filed: October 21, 2011
    Publication date: April 25, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Rajasekhar Venigalla, Michael Vincent Aquilino, Massud A. Aminpur, Michael P. Belyansky, Unoh Kwon, Christopher Duncan Sheraw, Daewon Yang