Patents by Inventor Christopher Fetzer

Christopher Fetzer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11175595
    Abstract: A method localizes assembly errors during the arrangement and/or the assembly of in particular vibration-isolated structural elements, in particular of components of optical arrangements, preferably of microlithographic projection exposure apparatuses.
    Type: Grant
    Filed: September 19, 2019
    Date of Patent: November 16, 2021
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Thomas Niederhausen, Christoph Fetzer
  • Patent number: 11163239
    Abstract: A method for localizing an abnormality in a travel path of an optical component in or for a lithography apparatus includes: a) moving the optical component in at least one first degree of freedom; b) detecting a movement (Rz) of the optical component and/or a force acting on the optical component in at least one second degree of freedom; and c) localizing the abnormality as a function of the movement detected in b) and/or the force detected in b).
    Type: Grant
    Filed: October 8, 2020
    Date of Patent: November 2, 2021
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Frank Treubel, Christoph Fetzer
  • Publication number: 20210026252
    Abstract: A method for localizing an abnormality in a travel path of an optical component in or for a lithography apparatus includes: a) moving the optical component in at least one first degree of freedom; b) detecting a movement (Rz) of the optical component and/or a force acting on the optical component in at least one second degree of freedom; and c) localizing the abnormality as a function of the movement detected in b) and/or the force detected in b).
    Type: Application
    Filed: October 8, 2020
    Publication date: January 28, 2021
    Inventors: Frank Treubel, Christoph Fetzer
  • Publication number: 20200012197
    Abstract: A method localizes assembly errors during the arrangement and/or the assembly of in particular vibration-isolated structural elements, in particular of components of optical arrangements, preferably of microlithographic projection exposure apparatuses.
    Type: Application
    Filed: September 19, 2019
    Publication date: January 9, 2020
    Inventors: Thomas Niederhausen, Christoph Fetzer
  • Publication number: 20070137695
    Abstract: Methods and apparatuses for a dual heterojunction multijunction solar cell are disclosed. A method in accordance with the present invention comprises growing a base material for a solar cell, growing at least one dual heterojunction on the base material, and growing an emitter on the at least one dual heterojunction. An apparatus in acccordance with the present invention comprises a substrate, and a first subcell, coupled to the substrate, wherein the first subcell comprises a base region, coupled to the substrate, an emitter region, and at least one dual heterojunction, coupled between the base region and the emitter region, wherein the at least one dual heterojunction has a lower bandgap than the emitter region.
    Type: Application
    Filed: December 19, 2005
    Publication date: June 21, 2007
    Inventors: Christopher Fetzer, Dmitri Krut, David Joslin, Sara Joslin, Richard King
  • Publication number: 20070068572
    Abstract: A method of disordering a layer of an optoelectronic device including; growing a plurality of lower layers; introducing an isoelectronic surfactant; growing a layer; allowing the surfactant to desorb; and growing subsequent layers all performed at a low pressure of 25 torr.
    Type: Application
    Filed: September 7, 2006
    Publication date: March 29, 2007
    Inventors: Christopher Fetzer, James Ermer, Richard King, Peter Colter
  • Publication number: 20060249194
    Abstract: A solar cell array has at least one solar cell including a photovoltaic structure having a sun-facing front face and a back face, and having an active region, and an isotype heterojunction diode connected in electrical parallel with the active region of the photovoltaic structure.
    Type: Application
    Filed: May 4, 2005
    Publication date: November 9, 2006
    Applicant: THE BOEING COMPANY
    Inventors: David Joslin, Christopher Fetzer
  • Publication number: 20060202243
    Abstract: A metamorphic avalanche photodetector includes a substrate, and an active structure supported on the substrate. The active structure has a metamorphic absorption structure that absorbs light and responsively produces primary charge carriers, and an avalanche multiplication structure that receives the primary charge carriers from the metamorphic absorption structure and responsively produces secondary charge carriers. An output electrical contact is in electrical communication with the active structure to collect at least some of the secondary charge carriers. A buffer layer lies between the substrate and the active structure, between the active structure and the output electrical contact, or between the metamorphic absorption structure and the avalanche multiplication structure. A lattice parameter of the buffer layer varies with position through a thickness of the buffer layer.
    Type: Application
    Filed: March 11, 2005
    Publication date: September 14, 2006
    Applicant: THE BOEING COMPANY
    Inventors: Geoffrey Kinsey, Dmitri Krut, Joseph Boisvert, Christopher Fetzer, Richard King
  • Publication number: 20050274411
    Abstract: A solar cell includes a first layer having a first-layer lattice parameter, a second layer having a second-layer lattice parameter different from the first-layer lattice parameter, wherein the second layer includes a photoactive second-layer material; and a third layer having a third-layer lattice parameter different from the second-layer lattice parameter, wherein the third layer includes a photoactive third-layer material. A transparent buffer layer extends between and contacts the second layer and the third layer and has a buffer-layer lattice parameter that varies with increasing distance from the second layer toward the third layer, so as to lattice match to the second layer and to the third layer. There may be additional subcell layers and buffer layers in the solar cell.
    Type: Application
    Filed: June 15, 2004
    Publication date: December 15, 2005
    Inventors: Richard King, Christopher Fetzer, Peter Colter
  • Publication number: 20050274409
    Abstract: A multijunction solar cell includes a first photoactive subcell layer having a first-subcell lattice parameter and a composition including (a) at least one Group III element, at least one Group V element other than (nitrogen, phosphorus), and (nitrogen, phosphorus), or (b) a material selected from the group including GaInAsBi, GaInAsSb, GaInAsP, ZnGeAs2, or BGaInAs. The multijunction solar cell also has a substrate having a substrate lattice parameter different from the first-subcell lattice parameter, and a composition-graded buffer layer between the first photoactive subcell layer and the substrate and having a buffer-layer lattice parameter graded between the first-subcell lattice parameter and the substrate lattice parameter.
    Type: Application
    Filed: June 15, 2004
    Publication date: December 15, 2005
    Applicant: THE BOEING COMPANY
    Inventors: Christopher Fetzer, Richard King, Peter Colter