Patents by Inventor Christopher Garmer

Christopher Garmer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and process for treating dielectric materials
    Patent number: 7709814
    Abstract: Apparatuses and processes for treating dielectric materials such as low k dielectric materials, premetal dielectric materials, barrier layers, and the like, generally comprise a radiation source module, a process chamber module coupled to the radiation source module; and a loadlock chamber module in operative communication with the process chamber and a wafer handler. The atmosphere of each one of the modules can be controlled as may be desired for different types of dielectric materials. The radiation source module includes a reflector, an ultraviolet radiation source, and a plate transmissive to the wavelengths of about 150 nm to about 300 nm, to define a sealed interior region, wherein the sealed interior region is in fluid communication with a fluid source.
    Type: Grant
    Filed: June 17, 2005
    Date of Patent: May 4, 2010
    Assignee: Axcelis Technologies, Inc.
    Inventors: Carlo Waldfried, Christopher Garmer, Orlando Escorcia, Ivan Berry, III, Palani Sakthivel, Alan C. Janos
  • Apparatus and process for treating dielectric materials
    Publication number: 20060141806
    Abstract: Apparatuses and processes for treating dielectric materials such as low k dielectric materials, premetal dielectric materials, barrier layers, and the like, generally comprise a radiation source module, a process chamber module coupled to the radiation source module; and a loadlock chamber module in operative communication with the process chamber and a wafer handler. The atmosphere of each one of the modules can be controlled as may be desired for different types of dielectric materials. The radiation source module includes a reflector, an ultraviolet radiation source, and a plate transmissive to the wavelengths of about 150 nm to about 300 nm, to define a sealed interior region, wherein the sealed interior region is in fluid communication with a fluid source.
    Type: Application
    Filed: June 17, 2005
    Publication date: June 29, 2006
    Inventors: Carlo Waldfried, Christopher Garmer, Orlando Escorcia, Ivan Berry, Palani Sakthivel, Alan Janos