Patents by Inventor Christopher Hofmeister

Christopher Hofmeister has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190139790
    Abstract: A dispense arm device for controllably discharging a fluid onto a substrate includes a dispense head coupled to and contained within an arm portion of the dispense arm device, wherein the dispense head having a valve assembly that is configured to operate in: (1) a recirculation mode in which a dispense outlet formed in the dispense head is closed off and a recirculation path is opened for allowing heated chemistry that is delivered to the dispense head to be delivered back from the dispense head to a remote location (e.g., a recycle tank); and (2) a dispense mode in which the dispense outlet is opened to allow heated chemistry to be discharged from the dispense head and the recirculation path is closed off.
    Type: Application
    Filed: November 2, 2018
    Publication date: May 9, 2019
    Inventors: Paul Vit, William Gilbert Breingan, Christopher Hofmeister
  • Patent number: 10269604
    Abstract: An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.
    Type: Grant
    Filed: January 21, 2015
    Date of Patent: April 23, 2019
    Assignee: Persimmon Technologies Corporation
    Inventors: Christopher Hofmeister, Martin Hosek
  • Publication number: 20190115238
    Abstract: An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.
    Type: Application
    Filed: December 10, 2018
    Publication date: April 18, 2019
    Inventors: Christopher Hofmeister, Martin Hosek
  • Publication number: 20180370024
    Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.
    Type: Application
    Filed: September 4, 2018
    Publication date: December 27, 2018
    Inventors: Ulysses Gilchrist, Christopher Hofmeister
  • Patent number: 10116184
    Abstract: An apparatus including a housing; a motor having a stator and a rotor, where the stator is connected to the housing; an environment barrier extending between the stator and the rotor; and a sealing system connecting the environment barrier with the housing. The sealing system includes a first seal interface and a second seal interface. The first seal interface connects to the housing at a first diameter which is at least partially less than or equal to an inner diameter of the stator. The second seal interface connects to the housing at a second diameter which is at least partially greater than or equal to an outer diameter of the stator.
    Type: Grant
    Filed: April 21, 2015
    Date of Patent: October 30, 2018
    Assignee: Persimmon Technologies Corporation
    Inventors: Martin Hosek, Christopher Hofmeister, Dennis Poole
  • Patent number: 10069371
    Abstract: An apparatus including a housing; a motor having a stator and a rotor, where the stator is connected to the housing; an environment barrier extending between the stator and the rotor; and a sealing system connecting the environment barrier with the housing. The sealing system includes a first seal interface and a second seal interface. The first seal interface connects to the housing at a first diameter which is at least partially less than or equal to an inner diameter of the stator. The second seal interface connects to the housing at a second diameter which is at least partially greater than or equal to an outer diameter of the stator.
    Type: Grant
    Filed: December 12, 2017
    Date of Patent: September 4, 2018
    Assignee: Persimmon Technologies Corporation
    Inventors: Martin Hosek, Christopher Hofmeister, Dennis Poole
  • Patent number: 10065307
    Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.
    Type: Grant
    Filed: November 4, 2013
    Date of Patent: September 4, 2018
    Assignee: Brooks Automation Inc.
    Inventors: Ulysses Gilchrist, Christopher Hofmeister
  • Publication number: 20180226280
    Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.
    Type: Application
    Filed: October 24, 2016
    Publication date: August 9, 2018
    Inventors: Christopher HOFMEISTER, Martin R. ELLIOTT, Alexander KRUPYSHEV, Joseph HALLISEY, Joseph KRAUS, William FOSNIGHT, Craig J. CARBONE, Jeffrey C. BLAHNIK, Ho Yin Owen FONG
  • Patent number: 10020704
    Abstract: An apparatus including a motor housing which includes a plurality of electrical connector apertures through the motor housing; a plurality of first electrical connectors which include a projecting pin section; a plurality of second electrical connectors which include a socket section configured to receive a respective projecting pin section; and a casing configured to press the first electrical connectors against respective seals at the electrical connector apertures to seal the electrical connector apertures. The first electrical connectors project through the respective seals. The projecting pin sections are located in the respective socket sections of the second electrical connectors with a press-fit therebetween to thereby connect the first and second electrical connectors.
    Type: Grant
    Filed: October 20, 2017
    Date of Patent: July 10, 2018
    Assignee: Persimmon Technologies Corporation
    Inventors: Martin Hosek, Tuan Ha, Christopher Hofmeister, Dennis Poole
  • Publication number: 20180114708
    Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.
    Type: Application
    Filed: October 24, 2016
    Publication date: April 26, 2018
    Inventors: Christopher HOFMEISTER, Martin R. ELLIOTT, Alexander KRUPYSHEV, Joseph HALLISEY, Joseph KRAUS, William FOSNIGHT, Craig J. CARBONE, Jeffrey C. BLAHNIK, Ho Yin Owen FONG
  • Publication number: 20180104831
    Abstract: An apparatus including a movable arm; a robot drive connected to the movable arm; and a heat transfer system. The robot drive includes a first drive configured to extend and retract the movable arm and a second drive configured to move the movable arm and the first drive along a linear path. The heat transfer system includes a first heat transfer member on the base and a second heat transfer member, where the heat transfer system is configured to transfer heat from the first drive to the first heat transfer member and then from the first heat transfer member to the second heat transfer member. The first heat transfer member travels with the base, and the first heat transfer member moves relative to the second heat transfer member as the base moves relative to the slide.
    Type: Application
    Filed: December 14, 2017
    Publication date: April 19, 2018
    Inventors: Martin Hosek, Tuan Ha, Christopher Hofmeister
  • Publication number: 20180104830
    Abstract: An apparatus including a movable arm; a robot drive connected to the movable arm; and a heat transfer system. The robot drive includes a first drive configured to extend and retract the movable arm and a second drive configured to move the movable arm and the first drive along a linear path. The heat transfer system includes a first heat transfer member on the base and a second heat transfer member, where the heat transfer system is configured to transfer heat from the first drive to the first heat transfer member and then from the first heat transfer member to the second heat transfer member. The first heat transfer member travels with the base, and the first heat transfer member moves relative to the second heat transfer member as the base moves relative to the slide.
    Type: Application
    Filed: December 14, 2017
    Publication date: April 19, 2018
    Inventors: Martin Hosek, Tuan Ha, Christopher Hofmeister
  • Publication number: 20180108553
    Abstract: A transport apparatus including a robot drive; an arm having a first end connected to the robot drive; and at least one end effector connected to a second end of the arm. The arm includes at least three links connected in series to, form the arm. The arm is configured to be moved by the robot drive to move the at least one end effector among load locks and two or more sets of opposing process modules.
    Type: Application
    Filed: December 14, 2017
    Publication date: April 19, 2018
    Inventors: Christopher Hofmeister, Martin HOSEK
  • Publication number: 20180108552
    Abstract: A transport apparatus including a robot drive; an arm having a first end connected to the robot drive; and at least one end effector connected to a second end of the arm. The arm includes at least three links connected in series to form the arm. The arm is configured to be moved by the robot drive to move the at least one end effector among load locks and two or more sets of opposing process modules.
    Type: Application
    Filed: December 14, 2017
    Publication date: April 19, 2018
    Inventors: Christopher Hofmeister, Martin Hosek
  • Publication number: 20180108551
    Abstract: An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.
    Type: Application
    Filed: December 19, 2017
    Publication date: April 19, 2018
    Inventors: Christopher Hofmeister, Martin Hosek
  • Publication number: 20180102684
    Abstract: An apparatus including a housing; a motor having a stator and a rotor, where the stator is connected to the housing; an environment barrier extending between the stator and the rotor; and a sealing system connecting the environment barrier with the housing. The sealing system includes a first seal interface and a second seal interface. The first seal interface connects to the housing at a first diameter which is at least partially less than or equal to an inner diameter of the stator. The second seal interface connects to the housing at a second diameter which is at least partially greater than or equal to an outer diameter of the stator.
    Type: Application
    Filed: December 12, 2017
    Publication date: April 12, 2018
    Inventors: Martin Hosek, Christopher Hofmeister, Dennis Poole
  • Publication number: 20180056509
    Abstract: A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted.
    Type: Application
    Filed: November 6, 2017
    Publication date: March 1, 2018
    Inventors: Martin Hosek, Christopher Hofmeister
  • Patent number: 9889557
    Abstract: A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted.
    Type: Grant
    Filed: January 14, 2014
    Date of Patent: February 13, 2018
    Assignee: Persimmon Technologies, Corp.
    Inventors: Martin Hosek, Christopher Hofmeister
  • Publication number: 20180041089
    Abstract: An apparatus including a motor housing which includes a plurality of electrical connector apertures through the motor housing; a plurality of first electrical connectors which include a projecting pin section; a plurality of second electrical connectors which include a socket section configured to receive a respective projecting pin section; and a casing configured to press the first electrical connectors against respective seals at the electrical connector apertures to seal the electrical connector apertures. The first electrical connectors project through the respective seals. The projecting pin sections are located in the respective socket sections of the second electrical connectors with a press-fit therebetween to thereby connect the first and second electrical connectors.
    Type: Application
    Filed: October 20, 2017
    Publication date: February 8, 2018
    Inventors: Martin Hosek, Tuan Ha, Christopher Hofmeister, Dennis Poole
  • Patent number: 9881825
    Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.
    Type: Grant
    Filed: November 14, 2014
    Date of Patent: January 30, 2018
    Assignee: Brooks Automation, Inc.
    Inventors: Ulysses Gilchrist, Michael L. Bufano, William Fosnight, Christopher Hofmeister, Gerarld M. Friedman