Patents by Inventor Christopher Hofmeister
Christopher Hofmeister has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20140341679Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.Type: ApplicationFiled: March 24, 2014Publication date: November 20, 2014Applicant: Brooks Automation, Inc.Inventors: Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist, William Fosnight
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Patent number: 8888433Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.Type: GrantFiled: August 19, 2005Date of Patent: November 18, 2014Assignee: Brooks Automation, Inc.Inventors: Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Gerald M. Friedman, Michael L. Bufano
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Publication number: 20140294551Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.Type: ApplicationFiled: June 16, 2014Publication date: October 2, 2014Inventors: Christopher Hofmeister, Alexander G. Krupyshev, Krysztof A. Majczak, Martin Hosek, Jay Krishnasamy
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Patent number: 8827617Abstract: A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.Type: GrantFiled: February 11, 2013Date of Patent: September 9, 2014Assignee: Brooks Automation Inc.Inventors: Christopher Hofmeister, Robert T. Caveney
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Patent number: 8823294Abstract: A method of commutating a motor includes calculating an adjustment electrical angle, and utilizing the adjustment electrical angle in a common set of commutation equations so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor.Type: GrantFiled: June 27, 2007Date of Patent: September 2, 2014Assignee: Brooks Automation, Inc.Inventors: Martin Hosek, Jairo Terra Moura, Christopher Hofmeister
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Patent number: 8803513Abstract: An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.Type: GrantFiled: March 5, 2012Date of Patent: August 12, 2014Assignee: Brooks Automation, Inc.Inventors: Martin Hosek, Christopher Hofmeister, John F. Zettler, Alexander Krupyshev, Sergei Syssoev, Krzystof Majczak
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Publication number: 20140205416Abstract: A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted.Type: ApplicationFiled: March 15, 2013Publication date: July 24, 2014Applicant: Persimmon Technologies Corp.Inventors: Martin Hosek, Christopher Hofmeister
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Publication number: 20140178157Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.Type: ApplicationFiled: March 3, 2014Publication date: June 26, 2014Applicant: Brooks Automation, Inc.Inventors: Christopher Hofmeister, Martin R. Elliot, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus, William Fosnight, Craig J. Carbone, Jeffrey C. Blahnik, Ho Yin Owen Fong
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Patent number: 8752449Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.Type: GrantFiled: May 8, 2008Date of Patent: June 17, 2014Assignee: Brooks Automation, Inc.Inventors: Christopher Hofmeister, Alexander G. Krupyshev, Krysztof A. Majczak, Martin Hosek, Jay Krishnasamy
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Publication number: 20140161570Abstract: A substrate processing apparatus is presented having a transport chamber defining substantially linear substrate transport paths, a linear array of substrate holding modules, each communicably connected to the chamber. The substrate transport has at least one transporter capable of holding and moving the substrate on more than one substantially linear substrate transport paths. The transport chamber having different transport tubes at least one of which is sealable at both ends of the transport tube and configured to hold an isolated atmosphere different from that of the transport tubes, each of the different transport tubes having one of the substrate transport paths located therein different from another of the transport paths located in another of the transport tubes, and being communicably connected to each other, where at least one of the transport tubes is configured to provide uninterrupted transit of the substrate transport through the transport tubes.Type: ApplicationFiled: February 14, 2014Publication date: June 12, 2014Applicant: Brooks Automation, Inc.Inventors: Christopher Hofmeister, Robert T. Caveney
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Patent number: 8747050Abstract: A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.Type: GrantFiled: September 14, 2012Date of Patent: June 10, 2014Assignee: Brooks Automation, Inc.Inventors: Christopher Hofmeister, Robert T. Caveney
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Publication number: 20140137690Abstract: A substrate transport arm including a plurality of links rotatably connected to each other in series; and a system for maintaining radial orientation of a third one of the links regardless of a rotational angle of first and second ones of the links relative to each other. The system for maintaining radial orientation includes a four-bar linkage.Type: ApplicationFiled: March 8, 2013Publication date: May 22, 2014Applicant: Persimmon Technologies, Corp.Inventor: Christopher HOFMEISTER
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Publication number: 20140126987Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.Type: ApplicationFiled: November 4, 2013Publication date: May 8, 2014Applicant: Brooks Automation Inc.Inventors: Ulysses Gilchrist, Christopher Hofmeister
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Patent number: 8716909Abstract: A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.Type: GrantFiled: January 18, 2013Date of Patent: May 6, 2014Assignee: Persimmon Technologies, Corp.Inventors: Martin Hosek, Tuan Ha, Christopher Hofmeister, Dennis Poole
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Publication number: 20140103752Abstract: A multi-phase motor including a rotor and a stator including at least one core. The stator includes a plurality of phase sections. Each phase section is configured to provide a phase of the multi-phase motor. Each phase section includes at least one of the core(s), at least two ring magnets having polarity facing in a substantially same direction, and a winding between the at least two ring magnets. The winding is configured to be energized to direct flux through the at least one core at a first portion associated with a first one of the ring magnets, and to be differently energized to direct flux through the at least one core at a second portion associated with a second one of the ring magnets.Type: ApplicationFiled: March 11, 2013Publication date: April 17, 2014Applicant: Persimmon Technologies, Corp.Inventor: Christopher HOFMEISTER
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Patent number: 8680803Abstract: In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.Type: GrantFiled: August 6, 2012Date of Patent: March 25, 2014Assignee: Brooks Automation, Inc.Inventors: Alexander G. Krupyshev, Christopher Hofmeister
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Patent number: 8678734Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.Type: GrantFiled: October 4, 2010Date of Patent: March 25, 2014Assignee: Brooks Automation, Inc.Inventors: Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist, William Fosnight
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Publication number: 20140077637Abstract: A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.Type: ApplicationFiled: January 18, 2013Publication date: March 20, 2014Applicant: Persimmon Technologies, Corp.Inventors: Martin HOSEK, Tuan Ha, Christopher Hofmeister, Dennis Poole
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Publication number: 20140077629Abstract: A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.Type: ApplicationFiled: January 18, 2013Publication date: March 20, 2014Applicant: Persimmon Technologies, Corp.Inventors: Martin HOSEK, Tuan HA, Christopher HOFMEISTER, Dennis POOLE
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Patent number: 8662812Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.Type: GrantFiled: September 24, 2012Date of Patent: March 4, 2014Assignee: Brooks Automation, Inc.Inventors: Christopher Hofmeister, Martin R. Elliot, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus, William Fosnight, Craig J. Carbone, Jeffrey C. Blahnik, Ho Yin Owen Fong