Abstract: A low cost method of producing proper source/drain junctions and transistor characteristics is disclosed. Through consolidation of masking steps, source/drain processing has a significantly lower cost with no performance loss. A blanket boron implant is employed as both a PLDD implant for the PMOS and a halo region implant for the NMOS. After formation of sidewall spacers on the gates, a masked arsenic and phosphorous implant is employed as a N+ implant. Because the phosphorous drives in faster than the arsenic, the desired N+/NLDD/halo architecture is generated. A masked boron implant is then employed as the P+ implant. Thus, the source/drain junctions are formed using only two masked implants. In an alternative embodiment, a third masked implant of phosphorous is used to form the NLDD junction prior to the sidewall spacer deposition instead of phosphorous being implanted with the arsenic.