Abstract: In a beam lithography operation the relative motion between a work piece and the exposure beam produces variations in linear speed at different regions of the work piece surface. For example, if a disk work piece rotates with a constant angular velocity (CAV) relative to the beam, the linear surface speed relative to the beam impact point increases in proportion to increasing radial distance of that point from the center of the disk. To provide uniform exposure dose, the duty cycle of pulses of the exposure beam are varied in accord with radial distance.

Abstract: The manufacture of magnetic disks for disk drives requires formation or servo tracks in a concentric pattern on the disk. Certain types of beam apparatuses for forming feature patterns on a disk shaped substrate, such as might be used in hard disk manufacture, however, provide spiral patterns. A ramp type deflection signal therefore is used to deflect the beam so as to form one circular pattern during each rotational cycle, and thereby convert the spiral pattern to a pattern comprising a series of circles.

Abstract: A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprising the sequential steps of providing a substrate/workpiece comprising a topographical pattern formed in a portion of a surface of the substrate/workpiece. The pattern defines a periphery. An alignment mark is formed in another portion of the surface of surrounding the periphery. An opaque protective film is formed overlying the entirety of the surface. A peripheral portion of the protective film is removed to expose the alignment mark. Selected portions of the substrate/workpiece are removed while the alignment mark is utilized for accurate alignment during the removal process. Remaining portions of the protective film are removed prior to use.

Abstract: The manufacture of magnetic disks for disk drives requires formation or servo tracks in a concentric pattern on the disk. Certain types of beam apparatuses for forming patterns on disks, however, provide spiral patterns. A ramp type deflection signal therefore is used to deflect the beam so as to form one circular pattern during each rotational cycle, and thereby convert the spiral pattern to a pattern comprising a series of circles.