Patents by Inventor Christopher J. Smart

Christopher J. Smart has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Storage capacitors using high dielectric constant materials
    Patent number: 5461536
    Abstract: A storage capacitor having high dielectric constant materials and a method for forming same are described. The method solves the problems associated with fabrication of planar capacitors for DRAM chips constructed from inorganic oxides with perovskite structure. These materials are not readily etched by conventional ion etching techniques. These materials also react with silicon and silicon dioxide and the disclosed process avoids these interactions.
    Type: Grant
    Filed: November 29, 1994
    Date of Patent: October 24, 1995
    Assignee: International Business Machines Corporation
    Inventors: David B. Beach, Alfred Grill, Christopher J. Smart
  • Method of fabricating storage capacitors using high dielectric constant materials
    Patent number: 5416042
    Abstract: A storage capacitor having high dielectric constant materials and a method for forming same are described. The method solves the problems associated with fabrication of planar capacitors for DRAM chips constructed from inorganic oxides with perovskite structure. These materials are not readily etched by conventional ion etching techniques. These materials also react with silicon and silicon dioxide and the disclosed process avoids these interactions.
    Type: Grant
    Filed: June 9, 1994
    Date of Patent: May 16, 1995
    Assignee: International Business Machines Corporation
    Inventors: David B. Beach, Alfred Grill, Christopher J. Smart