Patents by Inventor Christopher J. Vroman

Christopher J. Vroman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7052809
    Abstract: A gas porous media which comprises a material having a low coefficient of thermal expansion that is capable of retaining 99.99% or more of particles of a size of about 0.003 microns and larger at 0.2 slpm/cm2 while demonstrating a permeability of 3.5×10?12 m2 and a porosity of around 62% is disclosed. The porous media can be fabricated into a frame that is capable of retaining 99.9999999% of particles greater than 0.003 ?m in diameter at 8.3 sccm/cm2 with a permeability of 3.0×10?13 m2 and a porosity of around 53%. The porous medias can be tailored by changing the raw materials and process to yield media with a range of porosities and that exhibit permeability between 1.0E?13 and 1.0E?11 m2. The porous media are used in frames for supporting a pellicle and a reticle in a parallel relationship to each other. The frames may comprise porous media in its entirety or the porous media can be fabricated and sealed into a solid support frame.
    Type: Grant
    Filed: October 2, 2003
    Date of Patent: May 30, 2006
    Assignee: Mykrolis Corporation
    Inventors: Christopher J. Vroman, Nathan Abbott
  • Patent number: 6964693
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: March 31, 2003
    Date of Patent: November 15, 2005
    Assignee: Mykrolis Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 6770113
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: July 27, 2001
    Date of Patent: August 3, 2004
    Assignee: Mykrolis Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Publication number: 20040109153
    Abstract: The present invention provides a gas porous media, the bulk matrix of which comprises a material having a low coefficient of thermal expansion that is also capable of retaining 99.99% or more of particles of a size of about 0.003 microns and larger at 0.2 slpm/cm2 while demonstrating a permeability of 3.5×10−12 m2 and a porosity of around 62%. The porous media, preferably a membrane, is also fabricated into in such a way that the resultant assembly, in this case a frame, is capable of retaining 99.9999999% of particles greater than 0.003 um in diameter at 8.3 sccm/cm2 with a permeability of 3.0×10−13 m2 and a porosity of around 53%. Both porous medias can be tailored by changing the raw materials and process to yield a range of porosities and exhibit permeability between 1.0E−13 and 1.0E−11 m2.
    Type: Application
    Filed: October 2, 2003
    Publication date: June 10, 2004
    Inventors: Christopher J. Vroman, Nathan Abbott
  • Publication number: 20030200834
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen.
    Type: Application
    Filed: March 31, 2003
    Publication date: October 30, 2003
    Applicant: Mykrolis Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 6623543
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: November 28, 2000
    Date of Patent: September 23, 2003
    Assignee: Mykrolis Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 6540809
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: November 28, 2000
    Date of Patent: April 1, 2003
    Assignee: Mykrolis Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Publication number: 20010049979
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen.
    Type: Application
    Filed: July 27, 2001
    Publication date: December 13, 2001
    Applicant: Mykrolis Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 6197085
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: October 8, 1998
    Date of Patent: March 6, 2001
    Assignee: Millipore Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 6193778
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: October 8, 1998
    Date of Patent: February 27, 2001
    Assignee: Millipore Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 5814272
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: February 21, 1996
    Date of Patent: September 29, 1998
    Assignee: Millipore Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman