Abstract: A multilayer micromirror structure that exhibits substantially no form change as a result of a given change in temperature is disclosed. A reflective layer is disposed on a substrate layer, and a counterbalancing structure is disposed on the structure in a way such that a neutral plane is located at a predetermined position relative to the substrate layer and the reflective layer. When forces are exerted at the neutral plane of such a structure, the structure attains a predetermined geometric form. A method of manufacture is disclosed wherein a substrate is etched to define a desired structure and a conformal layer of a masking material is deposited onto the etched substrate. Further etching exposes portions of the substrate and silicon is deposited to achieve another desired structure. Excess material is etched away to free the finished structure and a reflective layer is deposited onto the surface of the structure.

Abstract: A multilayer micromirror structure that exhibits substantially no form change as a result of a given change in temperature is disclosed. A reflective layer is disposed on a substrate layer, and a counterbalancing structure is disposed on the structure in a way such that a neutral plane is located at a predetermined position relative to the substrate layer and the reflective layer. When forces are exerted at the neutral plane of such a structure, the structure attains a predetermined geometric form. A method of manufacture is disclosed wherein a substrate is etched to define a desired structure and a conformal layer of a masking material is deposited onto the etched substrate. Further etching exposes portions of the substrate and silicon is deposited to achieve another desired structure. Excess material is etched away to free the finished structure and a reflective layer is deposited onto the surface of the structure.

Abstract: The present invention is directed to a system for aligning optical fibers inserted into a faceplate hole or cavity in a fiber optic array. A plurality of flexible protrusions may be included, which extend inwardly from the inner perimeter of the cavity to contact the optical fiber as it is inserted into the cavity. The protrusions are substantially uniformly deformed by the insertion of the optical fiber into the cavity to align the optical fiber therein. In the preferred embodiment, the protrusions are three equally distant flanges extending the length of the cavity, which are tapered in relation to each other such that the spacing of the flanges at the faceplate is nominally small than the outside diameter of the optical fiber.