Patents by Inventor Christopher Kenyon

Christopher Kenyon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250133811
    Abstract: Self-aligned gate endcap (SAGE) architectures with improved caps, and methods of fabricating self-aligned gate endcap (SAGE) architectures with improved caps, are described. In an example, an integrated circuit structure includes a first gate structure over a first semiconductor fin. A second gate structure is over a second semiconductor fin. A gate endcap isolation structure is between the first gate structure and the second gate structure. The gate endcap isolation structure has a higher-k dielectric cap layer on a lower-k dielectric wall. The higher-k dielectric cap layer includes hafnium and oxygen and has 70% or greater monoclinic crystallinity.
    Type: Application
    Filed: December 23, 2024
    Publication date: April 24, 2025
    Inventors: Christine RADLINGER, Tongtawee WACHARASINDHU, Andre BARAN, Kiran CHIKKADI, Devin MERRILL, Nilesh DENDGE, David J. TOWNER, Christopher KENYON
  • Publication number: 20240347618
    Abstract: Self-aligned gate endcap (SAGE) architectures with improved caps, and methods of fabricating self-aligned gate endcap (SAGE) architectures with improved caps, are described. In an example, an integrated circuit structure includes a first gate structure over a first semiconductor fin. A second gate structure is over a second semiconductor fin. A gate endcap isolation structure is between the first gate structure and the second gate structure. The gate endcap isolation structure has a higher-k dielectric cap layer on a lower-k dielectric wall. The higher-k dielectric cap layer includes hafnium and oxygen and has 70% or greater monoclinic crystallinity.
    Type: Application
    Filed: June 26, 2024
    Publication date: October 17, 2024
    Inventors: Christine RADLINGER, Tongtawee WACHARASINDHU, Andre BARAN, Kiran CHIKKADI, Devin MERRILL, Nilesh DENDGE, David J. TOWNER, Christopher KENYON
  • Patent number: 11688792
    Abstract: Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.
    Type: Grant
    Filed: November 15, 2021
    Date of Patent: June 27, 2023
    Assignee: Intel Corporation
    Inventors: Sairam Subramanian, Walid M. Hafez, Sridhar Govindaraju, Mark Liu, Szuya S. Liao, Chia-Hong Jan, Nick Lindert, Christopher Kenyon
  • Publication number: 20230197826
    Abstract: Self-aligned gate endcap (SAGE) architectures with improved caps, and methods of fabricating self-aligned gate endcap (SAGE) architectures with improved caps, are described. In an example, an integrated circuit structure includes a first gate structure over a first semiconductor fin. A second gate structure is over a second semiconductor fin. A gate endcap isolation structure is between the first gate structure and the second gate structure. The gate endcap isolation structure has a higher-k dielectric cap layer on a lower-k dielectric wall. The higher-k dielectric cap layer includes hafnium and oxygen and has 70% or greater monoclinic crystallinity.
    Type: Application
    Filed: December 21, 2021
    Publication date: June 22, 2023
    Inventors: Christine RADLINGER, Tongtawee WACHARASINDHU, Andre BARAN, Kiran CHIKKADI, Devin MERRILL, Nilesh DENDGE, David J. TOWNER, Christopher KENYON
  • Patent number: 11605632
    Abstract: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: March 14, 2023
    Assignee: Intel Corporation
    Inventors: Walid M. Hafez, Sridhar Govindaraju, Mark Liu, Szuya S. Liao, Chia-Hong Jan, Nick Lindert, Christopher Kenyon, Sairam Subramanian
  • Patent number: 11569370
    Abstract: An integrated circuit structure comprises a semiconductor fin protruding through a trench isolation region above a substrate. A gate structure is over the semiconductor fin. A plurality of vertically stacked nanowires is through the gate structure, wherein the plurality of vertically stacked nanowires includes a top nanowire adjacent to a top of the gate structure, and a bottom nanowire adjacent to a top of the semiconductor fin. A dielectric material covers only a portion of the plurality of vertically stacked nanowires outside the gate structure, such that one or more one of the plurality of vertically stacked nanowires starting with the top nanowire is exposed from the dielectric material. Source and drain regions are on opposite sides of the gate structure connected to the exposed ones of the plurality of vertically stacked nanowires.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: January 31, 2023
    Assignee: Intel Corporation
    Inventors: Leonard P. Guler, Vivek Thirtha, Shu Zhou, Nitesh Kumar, Biswajeet Guha, William Hsu, Dax Crum, Oleg Golonzka, Tahir Ghani, Christopher Kenyon
  • Patent number: 11329138
    Abstract: Self-aligned gate endcap (SAGE) architectures having gate endcap plugs or contact endcap plugs, or both gate endcap plugs and contact endcap plugs, and methods of fabricating SAGE architectures having such endcap plugs, are described. In an example, a first gate structure is over a first of a plurality of semiconductor fins. A second gate structure is over a second of the plurality of semiconductor fins. A first gate endcap isolation structure is laterally between and in contact with the first gate structure and the second gate structure and has an uppermost surface co-planar with an uppermost surface of the first gate structure and the second gate structure. A second gate endcap isolation structure is laterally between and in contact with first and second lateral portions of the first gate structure and has an uppermost surface below an uppermost surface of the first gate structure.
    Type: Grant
    Filed: April 2, 2018
    Date of Patent: May 10, 2022
    Assignee: Intel Corporation
    Inventors: Sairam Subramanian, Christopher Kenyon, Sridhar Govindaraju, Chia-Hong Jan, Mark Liu, Szuya S. Liao, Walid M. Hafez
  • Publication number: 20220077302
    Abstract: Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.
    Type: Application
    Filed: November 15, 2021
    Publication date: March 10, 2022
    Inventors: Sairam SUBRAMANIAN, Walid M. HAFEZ, Sridhar GOVINDARAJU, Mark LIU, Szuya S. LIAO, Chia-Hong JAN, Nick LINDERT, Christopher KENYON
  • Publication number: 20220077145
    Abstract: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.
    Type: Application
    Filed: November 17, 2021
    Publication date: March 10, 2022
    Inventors: Walid M. HAFEZ, Sridhar GOVINDARAJU, Mark LIU, Szuya S. LIAO, Chia-Hong JAN, Nick LINDERT, Christopher KENYON, Sairam SUBRAMANIAN
  • Patent number: 11217582
    Abstract: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.
    Type: Grant
    Filed: March 30, 2018
    Date of Patent: January 4, 2022
    Assignee: Intel Corporation
    Inventors: Walid M. Hafez, Sridhar Govindaraju, Mark Liu, Szuya S. Liao, Chia-Hong Jan, Nick Lindert, Christopher Kenyon, Sairam Subramanian
  • Patent number: 11205708
    Abstract: Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.
    Type: Grant
    Filed: April 2, 2018
    Date of Patent: December 21, 2021
    Assignee: Intel Corporation
    Inventors: Sairam Subramanian, Walid M. Hafez, Sridhar Govindaraju, Mark Liu, Szuya S. Liao, Chia-Hong Jan, Nick Lindert, Christopher Kenyon
  • Publication number: 20200411661
    Abstract: An integrated circuit structure comprises a semiconductor fin protruding through a trench isolation region above a substrate. A gate structure is over the semiconductor fin. A plurality of vertically stacked nanowires is through the gate structure, wherein the plurality of vertically stacked nanowires includes a top nanowire adjacent to a top of the gate structure, and a bottom nanowire adjacent to a top of the semiconductor fin. A dielectric material covers only a portion of the plurality of vertically stacked nanowires outside the gate structure, such that one or more one of the plurality of vertically stacked nanowires starting with the top nanowire is exposed from the dielectric material. Source and drain regions are on opposite sides of the gate structure connected to the exposed ones of the plurality of vertically stacked nanowires.
    Type: Application
    Filed: June 27, 2019
    Publication date: December 31, 2020
    Inventors: Leonard P. GULER, Vivek THIRTHA, Shu ZHOU, Nitesh KUMAR, Biswajeet GUHA, William HSU, Dax CRUM, Oleg GOLONZKA, Tahir GHANI, Christopher KENYON
  • Publication number: 20190304971
    Abstract: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.
    Type: Application
    Filed: March 30, 2018
    Publication date: October 3, 2019
    Inventors: Walid M. HAFEZ, Sridhar GOVINDARAJU, Mark LIU, Szuya S. LIAO, Chia-Hong JAN, Nick LINDERT, Christopher KENYON, Sairam SUBRAMANIAN
  • Publication number: 20190305112
    Abstract: Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.
    Type: Application
    Filed: April 2, 2018
    Publication date: October 3, 2019
    Inventors: Sairam SUBRAMANIAN, Walid M. HAFEZ, Sridhar GOVINDARAJU, Mark LIU, Szuya S. LIAO, Chia-Hong JAN, Nick LINDERT, Christopher KENYON
  • Publication number: 20190305111
    Abstract: Self-aligned gate endcap (SAGE) architectures having gate endcap plugs or contact endcap plugs, or both gate endcap plugs and contact endcap plugs, and methods of fabricating SAGE architectures having such endcap plugs, are described. In an example, a first gate structure is over a first of a plurality of semiconductor fins. A second gate structure is over a second of the plurality of semiconductor fins. A first gate endcap isolation structure is laterally between and in contact with the first gate structure and the second gate structure and has an uppermost surface co-planar with an uppermost surface of the first gate structure and the second gate structure. A second gate endcap isolation structure is laterally between and in contact with first and second lateral portions of the first gate structure and has an uppermost surface below an uppermost surface of the first gate structure.
    Type: Application
    Filed: April 2, 2018
    Publication date: October 3, 2019
    Inventors: Sairam SUBRAMANIAN, Christopher KENYON, Sridhar GOVINDARAJU, Chia-Hong JAN, Mark LIU, Szuya S. LIAO, Walid M. HAFEZ
  • Publication number: 20080313736
    Abstract: The invention provides a data network, systems and methods for checking nodes of a data network that are used for detecting whether a privacy policy concerning an information is maintained. The information comprises a mark corresponding to the privacy policy. The mark defines the storage place or the accessing paths or the transferring paths of the information. The mark is automatically searchable. The mark is searched, analyzed and checked as to whether the privacy policy is maintained. The advantage of the system is that vulnerabilities of systems for protecting confidential information may be detected a long time before an attack on the confidential information occurs.
    Type: Application
    Filed: July 31, 2008
    Publication date: December 18, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Birgit Baum-Waidner, Michael Waidner, Christopher Kenyon
  • Patent number: 7412724
    Abstract: The invention provides a data network, systems and methods for checking nodes of a data network that are used for detecting whether a privacy policy concerning an information is maintained. The information comprises a mark corresponding to the privacy policy. The mark defines the storage place or the accessing paths or the transferring paths of the information. The mark is automatically searchable. The mark is searched, analyzed and checked as to whether the privacy policy is maintained. The advantage of the system is that vulnerabilities of systems for protecting confidential information may be detected a long time before an attack on the confidential information occurs.
    Type: Grant
    Filed: July 27, 2004
    Date of Patent: August 12, 2008
    Assignee: International Business Machines Corporation
    Inventors: Birgit Baum-Waidner, Michael Waidner, Christopher Kenyon
  • Publication number: 20070239496
    Abstract: The invention relates to a method for modelling the operational risk of an entity, the method comprising the steps of: Compiling a list with one or more failure events; Compiling a list with one or more causes of the failure events; Compiling a list with one or more impact types of the failure events; Evaluating interdependencies between the failure events, the causes of the failure events and the impact types of the failure events; Decomposing the interdependencies, thereby establishing one or more independent impact sub-models.
    Type: Application
    Filed: January 24, 2006
    Publication date: October 11, 2007
    Applicant: International Business Machines Corporation
    Inventors: Chonawee Supatgiat, Christopher Kenyon, Lucas Heusler
  • Publication number: 20070165911
    Abstract: A method for authentication by biometric data, including receiving a biometric data set; evaluating if the received biometric data set is within a reference region, wherein the reference region represents a region associated with a reference biometric data set; evaluating if the received biometric data set is within a blackout region, wherein the blackout region represents a region associated with at least one previously received and positively authenticated biometric data set; and issuing a positive authentication if the received biometric data set is within the reference region, but outside the blackout region.
    Type: Application
    Filed: December 22, 2006
    Publication date: July 19, 2007
    Applicant: International Business Machines Corporation
    Inventors: Michael Baentsch, Peter Buhler, Christopher Kenyon
  • Publication number: 20070150408
    Abstract: A method for automatically linking an anonymous electronic trade order having an order quantity (q) to an identity of a trader by providing an identity marker (s) of the trader; embedding the identity marker (s) by splitting the anonymous trade order into a number (n) of trade orders each having a corresponding order quantity x (i) to generate a trade order set; and placing the generated trade order set in an electronic order book.
    Type: Application
    Filed: December 19, 2006
    Publication date: June 28, 2007
    Applicant: International Business Machines Corporation
    Inventors: Jan Camenisch, Christopher Kenyon