Patents by Inventor Christopher Kenyon
Christopher Kenyon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20250133811Abstract: Self-aligned gate endcap (SAGE) architectures with improved caps, and methods of fabricating self-aligned gate endcap (SAGE) architectures with improved caps, are described. In an example, an integrated circuit structure includes a first gate structure over a first semiconductor fin. A second gate structure is over a second semiconductor fin. A gate endcap isolation structure is between the first gate structure and the second gate structure. The gate endcap isolation structure has a higher-k dielectric cap layer on a lower-k dielectric wall. The higher-k dielectric cap layer includes hafnium and oxygen and has 70% or greater monoclinic crystallinity.Type: ApplicationFiled: December 23, 2024Publication date: April 24, 2025Inventors: Christine RADLINGER, Tongtawee WACHARASINDHU, Andre BARAN, Kiran CHIKKADI, Devin MERRILL, Nilesh DENDGE, David J. TOWNER, Christopher KENYON
-
Publication number: 20240347618Abstract: Self-aligned gate endcap (SAGE) architectures with improved caps, and methods of fabricating self-aligned gate endcap (SAGE) architectures with improved caps, are described. In an example, an integrated circuit structure includes a first gate structure over a first semiconductor fin. A second gate structure is over a second semiconductor fin. A gate endcap isolation structure is between the first gate structure and the second gate structure. The gate endcap isolation structure has a higher-k dielectric cap layer on a lower-k dielectric wall. The higher-k dielectric cap layer includes hafnium and oxygen and has 70% or greater monoclinic crystallinity.Type: ApplicationFiled: June 26, 2024Publication date: October 17, 2024Inventors: Christine RADLINGER, Tongtawee WACHARASINDHU, Andre BARAN, Kiran CHIKKADI, Devin MERRILL, Nilesh DENDGE, David J. TOWNER, Christopher KENYON
-
Patent number: 11688792Abstract: Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.Type: GrantFiled: November 15, 2021Date of Patent: June 27, 2023Assignee: Intel CorporationInventors: Sairam Subramanian, Walid M. Hafez, Sridhar Govindaraju, Mark Liu, Szuya S. Liao, Chia-Hong Jan, Nick Lindert, Christopher Kenyon
-
Publication number: 20230197826Abstract: Self-aligned gate endcap (SAGE) architectures with improved caps, and methods of fabricating self-aligned gate endcap (SAGE) architectures with improved caps, are described. In an example, an integrated circuit structure includes a first gate structure over a first semiconductor fin. A second gate structure is over a second semiconductor fin. A gate endcap isolation structure is between the first gate structure and the second gate structure. The gate endcap isolation structure has a higher-k dielectric cap layer on a lower-k dielectric wall. The higher-k dielectric cap layer includes hafnium and oxygen and has 70% or greater monoclinic crystallinity.Type: ApplicationFiled: December 21, 2021Publication date: June 22, 2023Inventors: Christine RADLINGER, Tongtawee WACHARASINDHU, Andre BARAN, Kiran CHIKKADI, Devin MERRILL, Nilesh DENDGE, David J. TOWNER, Christopher KENYON
-
Patent number: 11605632Abstract: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.Type: GrantFiled: November 17, 2021Date of Patent: March 14, 2023Assignee: Intel CorporationInventors: Walid M. Hafez, Sridhar Govindaraju, Mark Liu, Szuya S. Liao, Chia-Hong Jan, Nick Lindert, Christopher Kenyon, Sairam Subramanian
-
Patent number: 11569370Abstract: An integrated circuit structure comprises a semiconductor fin protruding through a trench isolation region above a substrate. A gate structure is over the semiconductor fin. A plurality of vertically stacked nanowires is through the gate structure, wherein the plurality of vertically stacked nanowires includes a top nanowire adjacent to a top of the gate structure, and a bottom nanowire adjacent to a top of the semiconductor fin. A dielectric material covers only a portion of the plurality of vertically stacked nanowires outside the gate structure, such that one or more one of the plurality of vertically stacked nanowires starting with the top nanowire is exposed from the dielectric material. Source and drain regions are on opposite sides of the gate structure connected to the exposed ones of the plurality of vertically stacked nanowires.Type: GrantFiled: June 27, 2019Date of Patent: January 31, 2023Assignee: Intel CorporationInventors: Leonard P. Guler, Vivek Thirtha, Shu Zhou, Nitesh Kumar, Biswajeet Guha, William Hsu, Dax Crum, Oleg Golonzka, Tahir Ghani, Christopher Kenyon
-
Patent number: 11329138Abstract: Self-aligned gate endcap (SAGE) architectures having gate endcap plugs or contact endcap plugs, or both gate endcap plugs and contact endcap plugs, and methods of fabricating SAGE architectures having such endcap plugs, are described. In an example, a first gate structure is over a first of a plurality of semiconductor fins. A second gate structure is over a second of the plurality of semiconductor fins. A first gate endcap isolation structure is laterally between and in contact with the first gate structure and the second gate structure and has an uppermost surface co-planar with an uppermost surface of the first gate structure and the second gate structure. A second gate endcap isolation structure is laterally between and in contact with first and second lateral portions of the first gate structure and has an uppermost surface below an uppermost surface of the first gate structure.Type: GrantFiled: April 2, 2018Date of Patent: May 10, 2022Assignee: Intel CorporationInventors: Sairam Subramanian, Christopher Kenyon, Sridhar Govindaraju, Chia-Hong Jan, Mark Liu, Szuya S. Liao, Walid M. Hafez
-
Publication number: 20220077302Abstract: Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.Type: ApplicationFiled: November 15, 2021Publication date: March 10, 2022Inventors: Sairam SUBRAMANIAN, Walid M. HAFEZ, Sridhar GOVINDARAJU, Mark LIU, Szuya S. LIAO, Chia-Hong JAN, Nick LINDERT, Christopher KENYON
-
Publication number: 20220077145Abstract: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.Type: ApplicationFiled: November 17, 2021Publication date: March 10, 2022Inventors: Walid M. HAFEZ, Sridhar GOVINDARAJU, Mark LIU, Szuya S. LIAO, Chia-Hong JAN, Nick LINDERT, Christopher KENYON, Sairam SUBRAMANIAN
-
Patent number: 11217582Abstract: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.Type: GrantFiled: March 30, 2018Date of Patent: January 4, 2022Assignee: Intel CorporationInventors: Walid M. Hafez, Sridhar Govindaraju, Mark Liu, Szuya S. Liao, Chia-Hong Jan, Nick Lindert, Christopher Kenyon, Sairam Subramanian
-
Patent number: 11205708Abstract: Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.Type: GrantFiled: April 2, 2018Date of Patent: December 21, 2021Assignee: Intel CorporationInventors: Sairam Subramanian, Walid M. Hafez, Sridhar Govindaraju, Mark Liu, Szuya S. Liao, Chia-Hong Jan, Nick Lindert, Christopher Kenyon
-
Publication number: 20200411661Abstract: An integrated circuit structure comprises a semiconductor fin protruding through a trench isolation region above a substrate. A gate structure is over the semiconductor fin. A plurality of vertically stacked nanowires is through the gate structure, wherein the plurality of vertically stacked nanowires includes a top nanowire adjacent to a top of the gate structure, and a bottom nanowire adjacent to a top of the semiconductor fin. A dielectric material covers only a portion of the plurality of vertically stacked nanowires outside the gate structure, such that one or more one of the plurality of vertically stacked nanowires starting with the top nanowire is exposed from the dielectric material. Source and drain regions are on opposite sides of the gate structure connected to the exposed ones of the plurality of vertically stacked nanowires.Type: ApplicationFiled: June 27, 2019Publication date: December 31, 2020Inventors: Leonard P. GULER, Vivek THIRTHA, Shu ZHOU, Nitesh KUMAR, Biswajeet GUHA, William HSU, Dax CRUM, Oleg GOLONZKA, Tahir GHANI, Christopher KENYON
-
Publication number: 20190304971Abstract: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.Type: ApplicationFiled: March 30, 2018Publication date: October 3, 2019Inventors: Walid M. HAFEZ, Sridhar GOVINDARAJU, Mark LIU, Szuya S. LIAO, Chia-Hong JAN, Nick LINDERT, Christopher KENYON, Sairam SUBRAMANIAN
-
Publication number: 20190305112Abstract: Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.Type: ApplicationFiled: April 2, 2018Publication date: October 3, 2019Inventors: Sairam SUBRAMANIAN, Walid M. HAFEZ, Sridhar GOVINDARAJU, Mark LIU, Szuya S. LIAO, Chia-Hong JAN, Nick LINDERT, Christopher KENYON
-
Publication number: 20190305111Abstract: Self-aligned gate endcap (SAGE) architectures having gate endcap plugs or contact endcap plugs, or both gate endcap plugs and contact endcap plugs, and methods of fabricating SAGE architectures having such endcap plugs, are described. In an example, a first gate structure is over a first of a plurality of semiconductor fins. A second gate structure is over a second of the plurality of semiconductor fins. A first gate endcap isolation structure is laterally between and in contact with the first gate structure and the second gate structure and has an uppermost surface co-planar with an uppermost surface of the first gate structure and the second gate structure. A second gate endcap isolation structure is laterally between and in contact with first and second lateral portions of the first gate structure and has an uppermost surface below an uppermost surface of the first gate structure.Type: ApplicationFiled: April 2, 2018Publication date: October 3, 2019Inventors: Sairam SUBRAMANIAN, Christopher KENYON, Sridhar GOVINDARAJU, Chia-Hong JAN, Mark LIU, Szuya S. LIAO, Walid M. HAFEZ
-
Publication number: 20080313736Abstract: The invention provides a data network, systems and methods for checking nodes of a data network that are used for detecting whether a privacy policy concerning an information is maintained. The information comprises a mark corresponding to the privacy policy. The mark defines the storage place or the accessing paths or the transferring paths of the information. The mark is automatically searchable. The mark is searched, analyzed and checked as to whether the privacy policy is maintained. The advantage of the system is that vulnerabilities of systems for protecting confidential information may be detected a long time before an attack on the confidential information occurs.Type: ApplicationFiled: July 31, 2008Publication date: December 18, 2008Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Birgit Baum-Waidner, Michael Waidner, Christopher Kenyon
-
Patent number: 7412724Abstract: The invention provides a data network, systems and methods for checking nodes of a data network that are used for detecting whether a privacy policy concerning an information is maintained. The information comprises a mark corresponding to the privacy policy. The mark defines the storage place or the accessing paths or the transferring paths of the information. The mark is automatically searchable. The mark is searched, analyzed and checked as to whether the privacy policy is maintained. The advantage of the system is that vulnerabilities of systems for protecting confidential information may be detected a long time before an attack on the confidential information occurs.Type: GrantFiled: July 27, 2004Date of Patent: August 12, 2008Assignee: International Business Machines CorporationInventors: Birgit Baum-Waidner, Michael Waidner, Christopher Kenyon
-
Publication number: 20070239496Abstract: The invention relates to a method for modelling the operational risk of an entity, the method comprising the steps of: Compiling a list with one or more failure events; Compiling a list with one or more causes of the failure events; Compiling a list with one or more impact types of the failure events; Evaluating interdependencies between the failure events, the causes of the failure events and the impact types of the failure events; Decomposing the interdependencies, thereby establishing one or more independent impact sub-models.Type: ApplicationFiled: January 24, 2006Publication date: October 11, 2007Applicant: International Business Machines CorporationInventors: Chonawee Supatgiat, Christopher Kenyon, Lucas Heusler
-
Publication number: 20070165911Abstract: A method for authentication by biometric data, including receiving a biometric data set; evaluating if the received biometric data set is within a reference region, wherein the reference region represents a region associated with a reference biometric data set; evaluating if the received biometric data set is within a blackout region, wherein the blackout region represents a region associated with at least one previously received and positively authenticated biometric data set; and issuing a positive authentication if the received biometric data set is within the reference region, but outside the blackout region.Type: ApplicationFiled: December 22, 2006Publication date: July 19, 2007Applicant: International Business Machines CorporationInventors: Michael Baentsch, Peter Buhler, Christopher Kenyon
-
Publication number: 20070150408Abstract: A method for automatically linking an anonymous electronic trade order having an order quantity (q) to an identity of a trader by providing an identity marker (s) of the trader; embedding the identity marker (s) by splitting the anonymous trade order into a number (n) of trade orders each having a corresponding order quantity x (i) to generate a trade order set; and placing the generated trade order set in an electronic order book.Type: ApplicationFiled: December 19, 2006Publication date: June 28, 2007Applicant: International Business Machines CorporationInventors: Jan Camenisch, Christopher Kenyon