Abstract: An automated storage and retrieval system includes a storage array of storage locations for case units. An in-out case conveyor is capable of bi-directionally transporting case units to and from the storage array, and an in-out loaded pallet conveyor is capable of bi-directionally transporting loaded pallets towards and away from the storage array. A palletizer-depalletizer cell includes a bi-directional pallet transport system with more than one independently driven pallet transports, each with a different pallet holder independently movable relative to a cell frame. Placement of case units commissioning a pallet layer loading a pallet, and removal of case units decommissioning a pallet layer unloading another pallet are both effected at the common pallet layer interface at a predetermined level of the cell frame. The pallet transports independently index a first and a second of the different pallet holders, each independently holding the pallet loading at the common pallet layer interface.

Abstract: An automated storage and retrieval system includes a storage array of storage locations for case units. An in-out case conveyor is capable of bi-directionally transporting case units to and from the storage array, and an in-out loaded pallet conveyor is capable of bi-directionally transporting loaded pallets towards and away from the storage array. A palletizer-depalletizer cell includes a bi-directional pallet transport system with more than one independently driven pallet transports, each with a different pallet holder independently movable relative to a cell frame. Placement of case units commissioning a pallet layer loading a pallet, and removal of case units decommissioning a pallet layer unloading another pallet are both effected at the common pallet layer interface at a predetermined level of the cell frame. The pallet transports independently index a first and a second of the different pallet holders, each independently holding the pallet loading at the common pallet layer interface.

Abstract: An automated storage and retrieval system includes a storage array of storage locations for case units. An in-out case conveyor is capable of bi-directionally transporting case units to and from the storage array, and an in-out loaded pallet conveyor is capable of bi-directionally transporting loaded pallets towards and away from the storage array. A palletizer-depalletizer cell includes a bi-directional pallet transport system with more than one independently driven pallet transports, each with a different pallet holder independently movable relative to a cell frame. Placement of case units commissioning a pallet layer loading a pallet, and removal of case units decommissioning a pallet layer unloading another pallet are both effected at the common pallet layer interface at a predetermined level of the cell frame. The pallet transports independently index a first and a second of the different pallet holders, each independently holding the pallet loading at the common pallet layer interface.

Abstract: An automated storage and retrieval system includes a storage array of storage locations for case units. An in-out case conveyor is capable of bi-directionally transporting case units to and from the storage array, and an in-out loaded pallet conveyor is capable of bi-directionally transporting loaded pallets towards and away from the storage array. A palletizer-depalletizer cell includes a bi-directional pallet transport system with more than one independently driven pallet transports, each with a different pallet holder independently movable relative to a cell frame. Placement of case units commissioning a pallet layer loading a pallet, and removal of case units decommissioning a pallet layer unloading another pallet are both effected at the common pallet layer interface at a predetermined level of the cell frame. The pallet transports independently index a first and a second of the different pallet holders, each independently holding the pallet loading at the common pallet layer interface.

Abstract: An automated storage and retrieval system includes a storage array of storage locations for case units. An in-out case conveyor is capable of bi-directionally transporting case units to and from the storage array, and an in-out loaded pallet conveyor is capable of bi-directionally transporting loaded pallets towards and away from the storage array. A palletizer-depalletizer cell includes a bi-directional pallet transport system with more than one independently driven pallet transports, each with a different pallet holder independently movable relative to a cell frame. Placement of case units commissioning a pallet layer loading a pallet, and removal of case units decommissioning a pallet layer unloading another pallet are both effected at the common pallet layer interface at a predetermined level of the cell frame. The pallet transports independently index a first and a second of the different pallet holders, each independently holding the pallet loading at the common pallet layer interface.

Abstract: An automated storage and retrieval system includes a storage array of storage locations for case units. An in-out case conveyor is capable of bi-directionally transporting case units to and from the storage array, and an in-out loaded pallet conveyor is capable of bi-directionally transporting loaded pallets towards and away from the storage array. A palletizer-depalletizer cell includes a bi-directional pallet transport system with more than one independently driven pallet transports, each with a different pallet holder independently movable relative to a cell frame. Placement of case units commissioning a pallet layer loading a pallet, and removal of case units decommissioning a pallet layer unloading another pallet are both effected at the common pallet layer interface at a predetermined level of the cell frame. The pallet transports independently index a first and a second of the different pallet holders, each independently holding the pallet loading at the common pallet layer interface.

Abstract: An automated storage and retrieval system includes a storage array of storage locations for case units. An in-out case conveyor is capable of bi-directionally transporting case units to and from the storage array, and an in-out loaded pallet conveyor is capable of bi-directionally transporting loaded pallets towards and away from the storage array. A palletizer-depalletizer cell includes a bi-directional pallet transport system with more than one independently driven pallet transports, each with a different pallet holder independently movable relative to a cell frame. Placement of case units commissioning a pallet layer loading a pallet, and removal of case units decommissioning a pallet layer unloading another pallet are both effected at the common pallet layer interface at a predetermined level of the cell frame. The pallet transports independently index a first and a second of the different pallet holders, each independently holding the pallet loading at the common pallet layer interface.

Abstract: A variety of process modules are described for use in semiconductor manufacturing processes.

Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.

Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.

Abstract: An transfer device for moving substrates from one position to another comprises a base and a drive arm pivotally connected to one another about a first pivot axis. A drive is connected to the drive arm for moving the drive arm through an arc about the first pivot axis. The drive arm has a free end which has a second pivot axis disposed parallel to the first pivot axis. The drive arm free end further including at least one article handling element which is rotatably disposed about the second pivot axis. A belt rotatably couples the at least one article handling element to the base such that upon movement of the drive arm through the arc in a first rotary direction the at least one article handling element is rotated in the other opposite direction to move a substrate along a straight line path.