Patents by Inventor Christopher L. Gruber

Christopher L. Gruber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma emission monitor and process gas delivery system
    Patent number: 9633823
    Abstract: A gas manifold for delivery gas to a sputtering chamber is provided with ports to accommodate plasma emission monitors to monitor plasma information in the sputtering chamber to provide feedback control. The collimators of the plasma emission monitors is exposed to gas flow and thus coating of the monitor is greatly reduced.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: April 25, 2017
    Assignee: Cardinal CG Company
    Inventors: Keith J. Burrows, Christopher L. Gruber, Klaus H. W. Hartig
  • PLASMA EMISSION MONITOR AND PROCESS GAS DELIVERY SYSTEM
    Publication number: 20140262751
    Abstract: A gas manifold for delivery gas to a sputtering chamber is provided with ports to accommodate plasma emission monitors to monitor plasma information in the sputtering chamber to provide feedback control. The collimators of the plasma emission monitors is exposed to gas flow and thus coating of the monitor is greatly reduced.
    Type: Application
    Filed: March 14, 2013
    Publication date: September 18, 2014
    Inventors: Keith J. Burrows, Christopher L. Gruber, Klaus H.W. Hartig